Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

Ho Young Park; Sang Cheol Nam; Young Chang Lim; Kyu Gil Choi; Ki Chang Lee; Gi Back Park; Seong Rae Lee; Heesook Park Kim; Sung Baek Cho

doi:10.1007/s10832-006-8976-3

Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

Ho Young Park, Sang Cheol Nam, Young Chang Lim, Kyu Gil Choi, Ki Chang Lee, Gi Back Park, Seong Rae Lee, Heesook Park Kim, Sung Baek Cho

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N₂ plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N₂ pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N₂ pressure decreased. The ionic conductivity closed to 10^-6 S cm^-1 and obtained a stability window of 1.0-5.0 V with an N₂ pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO ₂ complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm^-2-um^-1) and showed a considerably high rate capability.

Original language	English
Pages (from-to)	1023-1030
Number of pages	8
Journal	Journal of Electroceramics
Volume	17
Issue number	2-4
DOIs	https://doi.org/10.1007/s10832-006-8976-3
Publication status	Published - 2006 Dec

Keywords

Lipon
Nitrogen pressure
Solid electrolyte
Sputtering
Thin film battery

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Mechanics of Materials
Electrical and Electronic Engineering
Materials Chemistry

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10.1007/s10832-006-8976-3

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@article{3f06114426944b0994f21807aa2aff29,

title = "Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film",

abstract = "Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N2 plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N2 pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N2 pressure decreased. The ionic conductivity closed to 10-6 S cm-1 and obtained a stability window of 1.0-5.0 V with an N2 pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO 2 complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm-2-um-1) and showed a considerably high rate capability.",

keywords = "Lipon, Nitrogen pressure, Solid electrolyte, Sputtering, Thin film battery",

author = "Park, {Ho Young} and Nam, {Sang Cheol} and Lim, {Young Chang} and Choi, {Kyu Gil} and Lee, {Ki Chang} and Park, {Gi Back} and Lee, {Seong Rae} and Kim, {Heesook Park} and Cho, {Sung Baek}",

note = "Funding Information: Acknowledgment This work is supported by the dual-use technology program of MND, Korea and we thank to the Korea Basic Science Institute (Seoul) for the ICP-AES and XRD data.",

year = "2006",

month = dec,

doi = "10.1007/s10832-006-8976-3",

language = "English",

volume = "17",

pages = "1023--1030",

journal = "Journal of Electroceramics",

issn = "1385-3449",

publisher = "Springer Netherlands",

number = "2-4",

}

TY - JOUR

T1 - Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

AU - Park, Ho Young

AU - Nam, Sang Cheol

AU - Lim, Young Chang

AU - Choi, Kyu Gil

AU - Lee, Ki Chang

AU - Park, Gi Back

AU - Lee, Seong Rae

AU - Kim, Heesook Park

AU - Cho, Sung Baek

N1 - Funding Information: Acknowledgment This work is supported by the dual-use technology program of MND, Korea and we thank to the Korea Basic Science Institute (Seoul) for the ICP-AES and XRD data.

PY - 2006/12

Y1 - 2006/12

N2 - Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N2 plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N2 pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N2 pressure decreased. The ionic conductivity closed to 10-6 S cm-1 and obtained a stability window of 1.0-5.0 V with an N2 pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO 2 complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm-2-um-1) and showed a considerably high rate capability.

AB - Lithium phosphorous oxynitride(Lipon) thin films as a lithium ion conductive electrolyte were prepared by radio frequency reactive sputtering in N2 plasma. The properties of the amorphous Lipon solid electrolyte were investigated as a function of N2 pressure during reactive sputtering. The ionic conductivity and the electrochemical stability of Lipon thin films improved drastically as the N2 pressure decreased. The ionic conductivity closed to 10-6 S cm-1 and obtained a stability window of 1.0-5.0 V with an N2 pressure of 5 mTorr, where the number of nitrogen bonds between the phosphate groups were more than those formed at higher pressure. It was possible to fabricate the Li//LiCoO 2 complete thin film battery using this Lipon solid electrolyte, which exhibited excellent discharge characteristics close to the theoretical capacity (ca. 69 uAhcm-2-um-1) and showed a considerably high rate capability.

KW - Lipon

KW - Nitrogen pressure

KW - Solid electrolyte

KW - Sputtering

KW - Thin film battery

UR - http://www.scopus.com/inward/record.url?scp=33847213237&partnerID=8YFLogxK

U2 - 10.1007/s10832-006-8976-3

DO - 10.1007/s10832-006-8976-3

M3 - Article

AN - SCOPUS:33847213237

SN - 1385-3449

VL - 17

SP - 1023

EP - 1030

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 2-4

ER -

Effects of sputtering pressure on the characteristics of lithium ion conductive lithium phosphorous oxynitride thin film

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Keywords

ASJC Scopus subject areas

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