Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method

Chang Kim Jung; Dae Yoon Sung; Joon Lee Sung; Chaun Gi Choi; Kwangsoo No

doi:10.1143/JJAP.33.2675

Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method

Chang Kim Jung, Dae Yoon Sung, Joon Lee Sung, Chaun Gi Choi, Kwangsoo No

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO₂/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates.

Original language	English
Pages (from-to)	2675
Number of pages	1
Journal	Japanese journal of applied physics
Volume	33
Issue number	5R
DOIs	https://doi.org/10.1143/JJAP.33.2675
Publication status	Published - 1994 May
Externally published	Yes

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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title = "Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method",

abstract = "Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO2/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates.",

author = "{Kim Jung}, Chang and {Yoon Sung}, Dae and {Lee Sung}, Joon and Choi, {Chaun Gi} and Kwangsoo No",

year = "1994",

month = may,

doi = "10.1143/JJAP.33.2675",

language = "English",

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pages = "2675",

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T1 - Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method

AU - Kim Jung, Chang

AU - Yoon Sung, Dae

AU - Lee Sung, Joon

AU - Choi, Chaun Gi

AU - No, Kwangsoo

PY - 1994/5

Y1 - 1994/5

N2 - Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO2/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates.

AB - Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO2/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates.

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DO - 10.1143/JJAP.33.2675

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

IS - 5R

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Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method

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