Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method

Lead zirconate titanate (PZT) thin films were fabricated using sol-gel spinning onto Pt/glass, Pt/Ti/glass and Pt/Ti/SiO₂/Si substrates and heat-treated using rapid thermal annealing (RTA). The preferred orientation and the perovskite phase content of the PZT thin films were studied using X-ray diffraction analysis (XRD), and the polarization vs electric field (P-E) hysteresis characteristics were investigated using a standardized ferroelectric test system. All of the resulting films on platinized substrate with Ti adhesion layer were well crystallized with the perovskite phase. A preferred (111) orientation was obtained on the Pt/Ti/glass substrate. The saturation polarization of the PZT film on glass substrates was higher than that on Si substrates.