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Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method
Chang Kim Jung
,
Dae Yoon Sung
, Joon Lee Sung
, Chaun Gi Choi
, Kwangsoo No
Research output
:
Contribution to journal
›
Article
›
peer-review
31
Citations (Scopus)
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Dive into the research topics of 'Effects of Substrate and Bottom Electrodes on the Phase Formation of Lead Zirconate Titanate Thin Films Prepared by the Sol-Gel Method'. Together they form a unique fingerprint.
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Keyphrases
Substrate Effect
100%
Si Substrate
100%
Phase Formation
100%
Sol-gel Method
100%
Glass Substrate
100%
Bottom Electrode
100%
Perovskite
100%
Lead Zirconate Titanate Thin Films
100%
PZT Thin Films
100%
Preferred Orientation
50%
Silica
50%
Lead Zirconate Titanate
50%
Gel Spinning
50%
Electric Field (E-field)
50%
Sol-gel
50%
Rapid Thermal Annealing
50%
X-ray Diffraction (XRD) Analysis
50%
Phase Content
50%
PZT Film
50%
P-E Hysteresis
50%
Hysteresis Characteristics
50%
Adhesion Layer
50%
Saturation Polarization
50%
Material Science
Thin Films
100%
Lead Zirconate Titanate
100%
Sol-Gel
100%
Film
66%
Ferroelectric Material
33%
X Ray Diffraction Analysis
33%