Effects of substrate temperature on the electrical and the optical properties of n-type ZnO/p-type 4H-SiC

Ji Chul Jung, Ji Hong Kim, Kang Min Do, Byung Moo Moon, Sung Jae Joo, Wook Bahng, Sang Cheol Kim, Nam Kyun Kim, Sang Mo Koo

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We investigated the effect of the substrate temperature on the electrical and the optical properties of ZnO/4H-SiC structures. The n-type ZnO layer was grown on p-type 4H-SiC substrate by pulsed laser deposition to form p-n hetero-junction diode structure. The n-type ZnO thin films were deposited by pulsed laser deposition at different temperatures of 200, 400, and 600 °C, respectively. It was shown from transmission line method (TLM) and auger electron spectroscopy (AES) data that the sheet resistance of ZnO on SiC was increased from ∼760 Ω/square to ∼4000 Ω/square as the deposition temperature increases and the oxygen outdiffusion decreases. The I-V characteristics with and without illumination have also been studied.

    Original languageEnglish
    Title of host publicationSilicon Carbide and Related Materials 2011, ICSCRM 2011
    EditorsRobert P. Devaty, Michael Dudley, T. Paul Chow, Philip G. Neudeck
    PublisherTrans Tech Publications Ltd
    Pages1327-1330
    Number of pages4
    ISBN (Print)9783037854198
    DOIs
    Publication statusPublished - 2012
    Event14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011 - Cleveland, OH, United States
    Duration: 2011 Sept 112011 Sept 16

    Publication series

    NameMaterials Science Forum
    Volume717-720
    ISSN (Print)0255-5476
    ISSN (Electronic)1662-9752

    Other

    Other14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011
    Country/TerritoryUnited States
    CityCleveland, OH
    Period11/9/1111/9/16

    Keywords

    • N-type ZnO
    • P-type 4H-SiC
    • Substrate temperature

    ASJC Scopus subject areas

    • General Materials Science
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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