Effects of vanadium substitution on the electrical performance of amorphous SrBi₂Ta₂O₉ thin-film capacitors

Engineering & Materials Science

• Amorphous films 100%
• Film capacitor 89%
• Vanadium 75%
• Dielectric properties 74%
• Leakage currents 66%
• Substitution reactions 60%
• Thin films 58%
• Oxygen vacancies 47%
• Thick films 37%

Physics & Astronomy

• vanadium 63%
• capacitors 53%
• substitutes 48%
• dielectric properties 34%
• leakage 33%
• thin films 31%
• performance 27%
• valence 15%
• oxygen 12%

Chemical Compounds

• Capacitor 63%
• Leakage Current 53%
• Amorphous Material 42%
• Dielectric Property 41%
• Substitution Reaction 38%
• Valence 18%
• Dioxygen 9%