Efficient fabrication of wafer scale thin film of individualized single-walled carbon nanotubes by dual-nozzle spin casting

Yong Shin Kim, Soongeun Kwon, Dong Hun Shin, Hyung Cheoul Shim, Ju Yeon Woo, Donghyun Lim, Yoon Keun Kwak, Soohyun Kim, Chang Soo Han

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


In this paper, a dual-nozzle spin casting method was proposed to form a thin film of individualized single-walled carbon nanotubes (SWNTs) at the wafer scale. Each nozzle simultaneously ejected the SWNT solution and methanol, respectively. During the ejection process, two solutions were mixed at the contacting end of the nozzles and then dropped onto the substrate. Functionalization of the wafer substrate with the amine group improved the uniformity of the SWNT thin film as well as the adhesion between the individualized SWNTs and the substrate. The best condition of the spin casting involved the substrate functionalization using 3-aminopropyltriethosilane aqueous solution with a concentration of ∼10 mM and a deposition velocity of ∼5000 rpm. The root-mean-square roughness of the fabricated SWNT layer over the wafer substrate was found to be 1.4-1.8 nm, which indicated that the resultant thin film was one or two layers of SWNTs. The wafer scale SWNT thin film formed by dual-nozzle spin casting can be further used for the mass production and high integration of the SWNT nanoelectronic devices.

Original languageEnglish
Article number063905
JournalReview of Scientific Instruments
Issue number6
Publication statusPublished - 2010 Jun
Externally publishedYes

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (Grant No. 2009-0074686) and 21C Frontier Research Program through the Center for Nanoscale Mechatronics and Manufacturing. This work was also partially supported by the second stage of the Brain Korea 21 Project in 2010.

ASJC Scopus subject areas

  • Instrumentation


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