Electrical characteristics of a new lateral trench electrode IGBT for smart power IC

Ey Goo Kang; Seung Hyun Moon; Man Young Sung

doi:10.1109/ICSICT.2001.981439

Electrical characteristics of a new lateral trench electrode IGBT for smart power IC

Ey Goo Kang^*, Seung Hyun Moon, Man Young Sung

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A new small sized Lateral Trench Electrode Insulated Gate Bipolar Transistor (LTEIGBT) was proposed to improve characteristics of the conventional Lateral IGBT (LIGBT) and Lateral Trench gate IGBT (LTIGBT). The entire Electrode of LTEIGBT was replaced with trench-type electrode. The LTEIGBT was designed so that the width of the device was no more than 19μm. Latch-up current densities of the proposed LTEIGBT increased 10 and 2.3 times more than those of the conventional LIGBT and LTIGBT. Forward blocking voltage of the LTEIGBT was 130V. Conventional LIGBT and LTIGBT of the same size were 60V and 100V, respectively. Because the proposed LTEIGBT was constructed of trench-type electrodes, the electric field moved toward the trench-oxide layer and punch-through breakdown finally occurred.

Original language	English
Title of host publication	2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	127-130
Number of pages	4
Volume	1
ISBN (Electronic)	0780365208, 9780780365209
DOIs	https://doi.org/10.1109/ICSICT.2001.981439
Publication status	Published - 2001
Event	6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Shanghai, China Duration: 2001 Oct 22 → 2001 Oct 25

Other

Other	6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001
Country/Territory	China
City	Shanghai
Period	01/10/22 → 01/10/25

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/ICSICT.2001.981439

Cite this

Kang, E. G., Moon, S. H., & Sung, M. Y. (2001). Electrical characteristics of a new lateral trench electrode IGBT for smart power IC. In 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings (Vol. 1, pp. 127-130). Article 981439 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSICT.2001.981439

Electrical characteristics of a new lateral trench electrode IGBT for smart power IC. / Kang, Ey Goo; Moon, Seung Hyun; Sung, Man Young.
2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings. Vol. 1 Institute of Electrical and Electronics Engineers Inc., 2001. p. 127-130 981439.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kang, EG, Moon, SH & Sung, MY 2001, Electrical characteristics of a new lateral trench electrode IGBT for smart power IC. in 2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings. vol. 1, 981439, Institute of Electrical and Electronics Engineers Inc., pp. 127-130, 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001, Shanghai, China, 01/10/22. https://doi.org/10.1109/ICSICT.2001.981439

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abstract = "A new small sized Lateral Trench Electrode Insulated Gate Bipolar Transistor (LTEIGBT) was proposed to improve characteristics of the conventional Lateral IGBT (LIGBT) and Lateral Trench gate IGBT (LTIGBT). The entire Electrode of LTEIGBT was replaced with trench-type electrode. The LTEIGBT was designed so that the width of the device was no more than 19μm. Latch-up current densities of the proposed LTEIGBT increased 10 and 2.3 times more than those of the conventional LIGBT and LTIGBT. Forward blocking voltage of the LTEIGBT was 130V. Conventional LIGBT and LTIGBT of the same size were 60V and 100V, respectively. Because the proposed LTEIGBT was constructed of trench-type electrodes, the electric field moved toward the trench-oxide layer and punch-through breakdown finally occurred.",

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Electrical characteristics of a new lateral trench electrode IGBT for smart power IC

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