Electrical properties of Bi₅Nb₃O₁₅ thin film grown on TiN/SiO₂/Si at room temperature for metal - Insulator - Metal capacitors

Keyphrases

• Electrical Properties 100%
• Room Temperature 100%
• Silica 100%
• Metal-insulator-metal Capacitor 100%
• Bi5Nb3O15 100%
• Thick Film 33%
• High Performance 33%
• Si Substrate 33%
• Annealing 33%
• Low Leakage Current 33%
• Leakage Current Density 33%
• In Films 33%
• Capacitance Density 33%
• High Capacitance 33%
• Voltage Coefficient of Capacitance 33%
• Temperature Coefficient of Capacitance 33%
• Low Dissipation Factor 33%
• Low Temperature Coefficient 33%
• Linear Voltages 33%

Engineering

• Thin Films 100%
• Room Temperature 100%
• Metal-Insulator-Metal 100%
• Silicon Dioxide 100%
• Low-Temperature 33%
• Si Substrate 33%
• Dissipation Factor 33%
• Temperature Coefficient 33%

Material Science

• Thin Films 100%
• Film 100%
• Capacitor 100%
• Capacitance 75%
• Density 50%
• Thick Films 25%