@inproceedings{25c58e1a813643919557964d672ebdd8,
title = "Electrical properties of e-beam exposed silicon dioxides and their application to nano-devices",
author = "Choi, {B. H.} and Jung, {S. K.} and Kim, {S. I.} and Hwang, {S. W.} and Park, {J. H.} and Y. Kim and Kim, {E. K.} and Min, {S. K.}",
year = "1998",
doi = "10.1109/IMNC.1998.730046",
language = "English",
series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "206--207",
editor = "Yoo, {Hyung Joon} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",
note = "1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",
}