Abstract
Electrical properties of the electron-beam induced carbon contamination layers have been reported. Contacts to the contamination layers are achieved by a simple deposition of aluminum and the current-voltage characteristics are successfully measured. A double junction structure, with the size smaller than 10 nm, has been fabricated by a one-step electron beam irradiation and it exhibits Coulomb staircases at room temperature.
Original language | English |
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Pages (from-to) | 6996-6997 |
Number of pages | 2 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 37 |
Issue number | 12 B |
DOIs | |
Publication status | Published - 1998 |
Keywords
- Carbon
- Coulomb staircases
- Current-voltage
- Electron-beam
- Nano-devices
- Single electron tunneling
ASJC Scopus subject areas
- General Engineering
- General Physics and Astronomy