Keyphrases
Electrical Conductivity
100%
Co Nanowires
100%
Ruthenium
100%
Electrodeposit
100%
Resistivity Value
50%
Nanowires
37%
Electrical Properties
12%
Dielectric
12%
Silica
12%
Low Resistivity
12%
Heat Treatment
12%
Alloy Nanowires
12%
Integrated Circuits
12%
Composition Ranges
12%
Barrier Materials
12%
Thermally Stable
12%
Barrier Structure
12%
Individual Nanowire
12%
Electrical Microstructure
12%
Dry Deposition
12%
Interconnect Materials
12%
Co-alloying
12%
Ruthenium Alloy
12%
Damascene Process
12%
Cu Interconnect
12%
Material Science
Nanowire
100%
Electrical Resistivity
100%
Ruthenium
100%
Thin Films
12%
Electronic Circuit
12%
Silicon Dioxide
12%
Heat Treatment
12%
Ruthenium Alloys
12%
Phase Composition
12%
Dielectric Material
12%
Cobalt Alloy
12%
Engineering
Nanowire
100%
Nanoscale
33%
Interconnects
33%
Dielectrics
16%
Thin Films
16%
Heat Treatment
16%
Barrier Material
16%
Damascene Process
16%
Phase Composition
16%
Silicon Dioxide
16%
Integrated Circuit
16%