Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

Han Ki Kim; Tae Yeon Seong; Jae Hong Lim; Won Cho; Young Soo Yoon

doi:10.1016/S0378-7753(01)00864-3

Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

Han Ki Kim, Tae Yeon Seong, Jae Hong Lim, Won Cho, Young Soo Yoon

Research output: Contribution to journal › Article › peer-review

156 Citations (Scopus)

Abstract

The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O₂/(Ar+O₂) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co₃O₄ electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co₃O₄/LiPON/Co₃O₄ TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co₃O₄ films.

Original language	English
Pages (from-to)	167-171
Number of pages	5
Journal	Journal of Power Sources
Volume	102
Issue number	1-2
DOIs	https://doi.org/10.1016/S0378-7753(01)00864-3
Publication status	Published - 2001 Dec 1
Externally published	Yes

Keywords

Capacitance
CoO
Gas-ratio
LiPON electrolyte
Supercapacitor
Thin-film

ASJC Scopus subject areas

Renewable Energy, Sustainability and the Environment
Energy Engineering and Power Technology
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/S0378-7753(01)00864-3

Cite this

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title = "Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors",

abstract = "The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O2/(Ar+O2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films.",

keywords = "Capacitance, CoO, Gas-ratio, LiPON electrolyte, Supercapacitor, Thin-film",

author = "Kim, {Han Ki} and Seong, {Tae Yeon} and Lim, {Jae Hong} and Won Cho and {Soo Yoon}, Young",

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doi = "10.1016/S0378-7753(01)00864-3",

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TY - JOUR

T1 - Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

AU - Kim, Han Ki

AU - Seong, Tae Yeon

AU - Lim, Jae Hong

AU - Cho, Won

AU - Soo Yoon, Young

PY - 2001/12/1

Y1 - 2001/12/1

N2 - The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O2/(Ar+O2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films.

AB - The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O2/(Ar+O2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films.

KW - Capacitance

KW - CoO

KW - Gas-ratio

KW - LiPON electrolyte

KW - Supercapacitor

KW - Thin-film

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U2 - 10.1016/S0378-7753(01)00864-3

DO - 10.1016/S0378-7753(01)00864-3

M3 - Article

AN - SCOPUS:0035702636

SN - 0378-7753

VL - 102

SP - 167

EP - 171

JO - Journal of Power Sources

JF - Journal of Power Sources

IS - 1-2

ER -

Electrochemical and structural properties of radio frequency sputtered cobalt oxide electrodes for thin-film supercapacitors

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

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