Abstract
The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios of O2/(Ar+O2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film supercapacitors (TFSCs) are fabricated. There consist of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films.
Original language | English |
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Pages (from-to) | 167-171 |
Number of pages | 5 |
Journal | Journal of Power Sources |
Volume | 102 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 2001 Dec 1 |
Externally published | Yes |
Keywords
- Capacitance
- CoO
- Gas-ratio
- LiPON electrolyte
- Supercapacitor
- Thin-film
ASJC Scopus subject areas
- Renewable Energy, Sustainability and the Environment
- Energy Engineering and Power Technology
- Physical and Theoretical Chemistry
- Electrical and Electronic Engineering