Electrochemical nanopatterning on copper surface using an AFM cantilever tip

Gyudo Lee, Kihwan Nam, Suho Jeong, Huihun Jung, Bumjoon Choi, Sang Woo Lee, Dae Sung Yoon, Kilho Eom, Taeyun Kwon

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper, we present technique to fabricate nanopatterns on Cu thin films via an electrochemical nanomachining (ECN) using an atomic force microscope (AFM). A conductive AFM cantilever tip (Pt/Ir5 coated) was used to form an electric field between tip and Cu substrate with applying a voltage pulse, resulting in the generation of an etched nanopattern. In order to precisely construct the nanopatterns, an ultra-short pulse was applied onto the Cu film through the AFM cantilever tip. The line width of the nanopatterns (the lateral dimension) increased with increased pulse amplitude, on-time, and frequency. The tip velocity effect on the nanopattern line width was also investigated that the line width is decreased with increasing tip velocity. Experimental results were compared with an equivalent electrochemical circuit model representing an ECN technique. The study described here provides important insight for fabricating nanopatterns precisely using electrochemical methods with an AFM cantilever tip.

Original languageEnglish
Title of host publicationAdvanced Materials for Applications in Extreme Environments
Number of pages5
Publication statusPublished - 2011
Externally publishedYes
Event2010 MRS Fall Meeting - Boston, MA, United States
Duration: 2010 Nov 292010 Dec 3

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2010 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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