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Embossing on epoxy thermoset polymer using SiO
2
coated nickel template
Kyeong Jae Byeon
*
, Sung Hoon Hong
, Ki Yeon Yang
, Deok Kee Kim
,
Heon Lee
*
Corresponding author for this work
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2
coated nickel template'. Together they form a unique fingerprint.
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Keyphrases
Anti-stiction
100%
Thermosetting Polymers
100%
SiO2 Coating
100%
Epoxy Thermoset
100%
Electroplating
40%
Quartz Template
40%
Electron Beam Lithography
20%
Silica
20%
Nanopatterning
20%
Epoxy
20%
Si Wafer
20%
Seed Layer
20%
Reactive Ion Etching
20%
Mechanical Durability
20%
Brittleness
20%
Metal Seed
20%
Surface Protrusion
20%
Mass Production
20%
Nanosized Structures
20%
Imprint Lithography
20%
DUV Lithography
20%
Material Science
Thermoset Plastics
100%
Lithography
66%
Electroplating
66%
Poly Methyl Methacrylate
66%
Reactive Ion Etching
33%
Brittleness
33%
Surface (Surface Science)
33%