Emission characteristics of the Mo-coated silicon tips

Heung Woo Park; Byeong Kwon Ju; Jae Hoon Jung; Yun Hi Lee; Jung Ho Park; In Jae Chung; M. R. Hascard; Myung Hwan Oh

doi:10.1557/proc-424-371

Emission characteristics of the Mo-coated silicon tips

Heung Woo Park, Byeong Kwon Ju, Jae Hoon Jung, Yun Hi Lee, Jung Ho Park, In Jae Chung, M. R. Hascard, Myung Hwan Oh

Research output: Contribution to journal › Conference article › peer-review

Abstract

Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

Original language	English
Pages (from-to)	371-374
Number of pages	4
Journal	Materials Research Society Symposium - Proceedings
Volume	424
DOIs	https://doi.org/10.1557/proc-424-371
Publication status	Published - 1996
Event	Proceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA Duration: 1996 Apr 8 → 1996 Apr 12

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Emission characteristics of the Mo-coated silicon tips",

abstract = "Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.",

author = "Park, {Heung Woo} and Ju, {Byeong Kwon} and Jung, {Jae Hoon} and Lee, {Yun Hi} and Park, {Jung Ho} and Chung, {In Jae} and Hascard, {M. R.} and Oh, {Myung Hwan}",

year = "1996",

doi = "10.1557/proc-424-371",

language = "English",

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journal = "Materials Research Society Symposium - Proceedings",

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TY - JOUR

T1 - Emission characteristics of the Mo-coated silicon tips

AU - Park, Heung Woo

AU - Ju, Byeong Kwon

AU - Jung, Jae Hoon

AU - Lee, Yun Hi

AU - Park, Jung Ho

AU - Chung, In Jae

AU - Hascard, M. R.

AU - Oh, Myung Hwan

PY - 1996

Y1 - 1996

N2 - Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

AB - Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

UR - http://www.scopus.com/inward/record.url?scp=0030398897&partnerID=8YFLogxK

U2 - 10.1557/proc-424-371

DO - 10.1557/proc-424-371

M3 - Conference article

AN - SCOPUS:0030398897

SN - 0272-9172

VL - 424

SP - 371

EP - 374

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Spring Meeting

Y2 - 8 April 1996 through 12 April 1996

ER -

Emission characteristics of the Mo-coated silicon tips

Abstract

ASJC Scopus subject areas

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