Emission characteristics of the Mo-coated silicon tips

Heung Woo Park; Byeong Kwon Ju; Jae Hoon Jung; Yun Hi Lee; Jung Ho Park; In Jae Chung; M. R. Hascard; Myung Hwan Oh

doi:10.1557/proc-424-371

Emission characteristics of the Mo-coated silicon tips

Heung Woo Park^*
, Byeong Kwon Ju
, Jae Hoon Jung
, Yun Hi Lee
, Jung Ho Park
, In Jae Chung
, M. R. Hascard
, Myung Hwan Oh

^*Corresponding author for this work

School of Electrical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

Original language	English
Pages (from-to)	371-374
Number of pages	4
Journal	Materials Research Society Symposium - Proceedings
Volume	424
DOIs	https://doi.org/10.1557/proc-424-371
Publication status	Published - 1996
Event	Proceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA Duration: 1996 Apr 8 → 1996 Apr 12

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-424-371

Cite this

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title = "Emission characteristics of the Mo-coated silicon tips",

abstract = "Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.",

author = "Park, \{Heung Woo\} and Ju, \{Byeong Kwon\} and Jung, \{Jae Hoon\} and Lee, \{Yun Hi\} and Park, \{Jung Ho\} and Chung, \{In Jae\} and Hascard, \{M. R.\} and Oh, \{Myung Hwan\}",

year = "1996",

doi = "10.1557/proc-424-371",

language = "English",

volume = "424",

pages = "371--374",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

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TY - JOUR

T1 - Emission characteristics of the Mo-coated silicon tips

AU - Park, Heung Woo

AU - Ju, Byeong Kwon

AU - Jung, Jae Hoon

AU - Lee, Yun Hi

AU - Park, Jung Ho

AU - Chung, In Jae

AU - Hascard, M. R.

AU - Oh, Myung Hwan

PY - 1996

Y1 - 1996

N2 - Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

AB - Uniform and reproducible silicon tip arrays were fabricated using the reactive ion etching followed by the re-oxidation sharpening. Molybdenum was then coated on the some of the silicon tip array. Current-voltage characteristics and current fluctuations were measured in the high vacuum environment. Field emission currents were proved by the Fowler-Nordheim plot studies.

UR - https://www.scopus.com/pages/publications/0030398897

U2 - 10.1557/proc-424-371

DO - 10.1557/proc-424-371

M3 - Conference article

AN - SCOPUS:0030398897

SN - 0272-9172

VL - 424

SP - 371

EP - 374

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1996 MRS Spring Meeting

Y2 - 8 April 1996 through 12 April 1996

ER -

Emission characteristics of the Mo-coated silicon tips

Abstract

ASJC Scopus subject areas

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