Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

Jae Hee Han; Sun Hong Choi; Tae Young Lee; Ji Beom Yoo; Chong Yun Park; T. W. Jung; H. J. Kim; Y. J. Park; I. T. Han; J. N. Huh; J. H. Lee; Se Gi Yu; W. K. Yi; G. S. Park; N. S. Lee; J. M. Kim

Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

Jae Hee Han
, Sun Hong Choi
, Tae Young Lee
, Ji Beom Yoo^*
, Chong Yun Park
, T. W. Jung
, H. J. Kim
, Y. J. Park
, I. T. Han
, J. N. Huh
, J. H. Lee
, Se Gi Yu
, W. K. Yi
, G. S. Park
, N. S. Lee
, J. M. Kim

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Abstract

Vertically aligned carbon nanotubes (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH₃ as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (E_to) of 1.75 V/μm while CNT grown on invar under the same condition showed larger E_to. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs.

Original language	English
Pages	33-34
Number of pages	2
Publication status	Published - 2001
Externally published	Yes
Event	Proceedings of the 14th International Vacuum Microelectronics Conference - Davis, CA, United States Duration: 2001 Aug 12 → 2001 Aug 16

Conference

Conference	Proceedings of the 14th International Vacuum Microelectronics Conference
Country/Territory	United States
City	Davis, CA
Period	01/8/12 → 01/8/16

ASJC Scopus subject areas

Surfaces and Interfaces

Cite this

Han, J. H., Choi, S. H., Lee, T. Y., Yoo, J. B., Park, C. Y., Jung, T. W., Kim, H. J., Park, Y. J., Han, I. T., Huh, J. N., Lee, J. H., Yu, S. G., Yi, W. K., Park, G. S., Lee, N. S., & Kim, J. M. (2001). Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO. 33-34. Paper presented at Proceedings of the 14th International Vacuum Microelectronics Conference, Davis, CA, United States.

Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO. / Han, Jae Hee; Choi, Sun Hong; Lee, Tae Young et al.
2001. 33-34 Paper presented at Proceedings of the 14th International Vacuum Microelectronics Conference, Davis, CA, United States.

Research output: Contribution to conference › Paper › peer-review

Han, JH, Choi, SH, Lee, TY, Yoo, JB, Park, CY, Jung, TW, Kim, HJ, Park, YJ, Han, IT, Huh, JN, Lee, JH, Yu, SG, Yi, WK, Park, GS, Lee, NS & Kim, JM 2001, 'Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO', Paper presented at Proceedings of the 14th International Vacuum Microelectronics Conference, Davis, CA, United States, 01/8/12 - 01/8/16 pp. 33-34.

@conference{7de0b6d6e829451cb8668f68667a186b,

title = "Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO",

abstract = "Vertically aligned carbon nanotubes (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH3 as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (Eto) of 1.75 V/μm while CNT grown on invar under the same condition showed larger Eto. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs.",

author = "Han, \{Jae Hee\} and Choi, \{Sun Hong\} and Lee, \{Tae Young\} and Yoo, \{Ji Beom\} and Park, \{Chong Yun\} and Jung, \{T. W.\} and Kim, \{H. J.\} and Park, \{Y. J.\} and Han, \{I. T.\} and Huh, \{J. N.\} and Lee, \{J. H.\} and Yu, \{Se Gi\} and Yi, \{W. K.\} and Park, \{G. S.\} and Lee, \{N. S.\} and Kim, \{J. M.\}",

year = "2001",

language = "English",

pages = "33--34",

note = "Proceedings of the 14th International Vacuum Microelectronics Conference ; Conference date: 12-08-2001 Through 16-08-2001",

}

TY - CONF

T1 - Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

AU - Han, Jae Hee

AU - Choi, Sun Hong

AU - Lee, Tae Young

AU - Yoo, Ji Beom

AU - Park, Chong Yun

AU - Jung, T. W.

AU - Kim, H. J.

AU - Park, Y. J.

AU - Han, I. T.

AU - Huh, J. N.

AU - Lee, J. H.

AU - Yu, Se Gi

AU - Yi, W. K.

AU - Park, G. S.

AU - Lee, N. S.

AU - Kim, J. M.

PY - 2001

Y1 - 2001

N2 - Vertically aligned carbon nanotubes (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH3 as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (Eto) of 1.75 V/μm while CNT grown on invar under the same condition showed larger Eto. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs.

AB - Vertically aligned carbon nanotubes (CNTs) were grown on various catalytic metal coated glass substrate using plasma enhanced chemical vapor deposition (PECVD) with CO and NH3 as a carbon source and dilution and catalytic gas, respectively. Effects of growth parameters and catalytic layers on the emission properties of CNTs were investigated. CNTs on the Fe catalytic layer showed the low turn-on electric field (Eto) of 1.75 V/μm while CNT grown on invar under the same condition showed larger Eto. Growth conditions and catalytic layer were optimized for the enhancement of emission characteristics of CNTs.

UR - https://www.scopus.com/pages/publications/0035784261

M3 - Paper

AN - SCOPUS:0035784261

SP - 33

EP - 34

T2 - Proceedings of the 14th International Vacuum Microelectronics Conference

Y2 - 12 August 2001 through 16 August 2001

ER -

Emission properties of carbon nanotubes grown on various catalytic layer-coated glass using plasma enhanced chemical vapor deposition with CO

Abstract

Conference

ASJC Scopus subject areas

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