Abstract
We have improved an emission stability of Mo tips FEA (field emitter array). The effect of DLC (Diamond Like Carbon) films coated by layer-by-layer technique using PECVD on the electron emission characteristics of Mo tips FEA is examined. Turn-on voltage was lowered from 80 V for Mo tips to 65 V for DLC coated Mo tips FEA and maximum emission current was increased from 140 μA for Mo tips to 320 μA for DLC coated Mo tips FEA. An anode current for DLC coated Mo tips and Mo tips FEA of 0.1 μA per emitter are measured at the gate voltage of about 87 V and 107 V, respectively. And the emission current of DLC coated Mo tips FEA was more stable than that of Mo tips FEA.
| Original language | English |
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| Pages | 231-234 |
| Number of pages | 4 |
| Publication status | Published - 1996 |
| Event | Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC - St.Petersburg, Russia Duration: 1996 Jul 7 → 1996 Jul 12 |
Other
| Other | Proceedings of the 1996 9th International Vacuum Microelectronics Conference, IVMC |
|---|---|
| City | St.Petersburg, Russia |
| Period | 96/7/7 → 96/7/12 |
ASJC Scopus subject areas
- Surfaces and Interfaces