Enhanced analog synaptic behavior of SiN x/a-Si bilayer memristors through Ge implantation

Keonhee Kim, Soojin Park, Su Man Hu, Jonghan Song, Weoncheol Lim, Yeonjoo Jeong, Jaewook Kim, Suyoun Lee, Joon Young Kwak, Jongkil Park, Jong Keuk Park, Byeong Kwon Ju, Doo Seok Jeong, Inho Kim

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


Conductive bridging random access memory (CBRAM) has been considered to be a promising emerging device for artificial synapses in neuromorphic computing systems. Good analog synaptic behaviors, such as linear and symmetric synapse updates, are desirable to provide high learning accuracy. Although numerous efforts have been made to develop analog CBRAM for years, the stochastic and abrupt formation of conductive filaments hinders its adoption. In this study, we propose a novel approach to enhance the synaptic behavior of a SiNx/a-Si bilayer memristor through Ge implantation. The SiNx and a-Si layers serve as switching and internal current limiting layers, respectively. Ge implantation induces structural defects in the bulk and surface regions of the a-Si layer, enabling spatially uniform Ag migration and nanocluster formation in the upper SiNx layer and increasing the conductance of the a-Si layer. As a result, the analog synaptic behavior of the SiNx/a-Si bilayer memristor, such as the nonlinearity, on/off ratio, and retention time, is remarkably improved. An artificial neural network simulation shows that the neuromorphic system with the implanted SiNx/a-Si memristor provides a 91.3% learning accuracy mainly due to the improved linearity.

Original languageEnglish
Article number77
JournalNPG Asia Materials
Issue number1
Publication statusPublished - 2020 Dec

Bibliographical note

Funding Information:
This work was supported by the Korea Institute of Science and Technology (Grant No. 2E30610, 2E30761), the Korea Institute of Energy Technology Evaluation and Planning (Grant No. 20163010012450), and the National Research Foundation of Korea (NRF) (NRF-2019M3F3A1A02072175).

Publisher Copyright:
© 2020, The Author(s).

ASJC Scopus subject areas

  • Modelling and Simulation
  • General Materials Science
  • Condensed Matter Physics


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