Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure

Eun Jeong Bae, Shin Woo Kang, Geun Su Choi, Eun Bi Jang, Dong Hyun Baek, Byeong Kwon Ju, Young Wook Park

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


In this study, an external light extraction layer with a micro-nano hybrid structure was applied to improve the external light extraction efficiency of organic light-emitting diodes (OLEDs). A reactive ion-etching (RIE) process, using O2 and CHF3 plasma, was performed on the surface of the micro-scale pattern to form micro-nano hybrid structures. According to the results of this study, the nanostructures formed by the treatment of O2 and CHF3 were different, and the efficiency according to the structures was analyzed experimentally and theoretically. As a result, the OLED, to which the micro-nano hybrid structure, manufactured through a simple process, is applied, improved the external light extraction efficiency by up to 38%, and an extended viewing angle profile was obtained. Additionally, an effective method for enhancing the out-coupling efficiency of OLEDs was presented by optimizing the micro-nano hybrid structure according to process conditions.

Original languageEnglish
Article number1266
Issue number8
Publication statusPublished - 2022 Apr 1

Bibliographical note

Publisher Copyright:
© 2022 by the authors. Licensee MDPI, Basel, Switzerland.


  • light extraction
  • mico-nano hybrid structure
  • organic light-emitting diodes
  • reactive ion etching

ASJC Scopus subject areas

  • General Chemical Engineering
  • General Materials Science


Dive into the research topics of 'Enhanced Light Extraction from Organic Light-Emitting Diodes with Micro-Nano Hybrid Structure'. Together they form a unique fingerprint.

Cite this