Enhanced performance of ZnO nanowire field effect transistors by H 2 annealing

Kihyun Keem, Jeongmin Kang, Changjoon Yoon, Dong Young Jeong, Byung Moo Moon, Sangsig Kim

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


The electrical properties of ZnO nanowires are significantly dependent on their surface states. The surface trap charges degrade the device performance of field effect transistors. These trap charges are reduced by H2 annealing. In this work, a back-gate ZnO nanowire field effect transistor (FET) was fabricated by a photolithographic process, and its electrical properties were characterized. This back-gate FET was subsequently annealed under a flow of H2/Ar gas for 20 min. The back-gate FET annealed for 20 min exhibited remarkably enhanced electrical characteristics, as compared with the asfabricated back-gate FET; the peak transconductance was increased from 40 to 448 nS, the field effect mobility from 27 to 302cm2V-1 s-1, and the Imax/Imin ratio from 1.5 to 105.

Original languageEnglish
Pages (from-to)6230-6232
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number9 B
Publication statusPublished - 2007 Sept 20


  • Annealing
  • Field effect transistors
  • Hydrogen
  • Nanowire

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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