Enhanced thermal stability of high-dielectric Gd2O3 films using ZrO2 incorporation

  • M. H. Cho*
  • , D. W. Moon
  • , S. A. Park
  • , Y. S. Rho
  • , Y. K. Kim
  • , K. Jeong
  • , C. H. Chang
  • , J. H. Gu
  • , J. H. Lee
  • , S. Y. Choi
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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