Enhancement in emission angle of the blue LED chip fabricated on lens patterned sapphire (0 0 0 1)

Engineering & Materials Science

• Sapphire 100%
• Lenses 76%
• Light emitting diodes 74%
• Substrates 46%
• Metallorganic chemical vapor deposition 14%
• Semiconductor quantum wells 14%
• Inductively coupled plasma 13%
• Plasma etching 13%
• Full width at half maximum 13%
• Dry etching 13%
• Bias currents 12%
• Crystals 9%
• Temperature 3%

Physics & Astronomy

• sapphire 63%
• light emitting diodes 59%
• chips 59%
• lenses 55%
• augmentation 45%
• luminous intensity 17%
• injection 13%
• output 11%
• metalorganic chemical vapor deposition 8%
• quantum wells 7%
• etching 7%
• room temperature 5%
• curves 5%
• crystals 4%

Chemical Compounds

• Blue 54%
• Inductively Coupled Plasma 10%
• Etching 9%
• Chemical Vapour Deposition 9%
• Time 7%
• Shape 7%
• Ambient Reaction Temperature 5%
• Reduction 4%