Enhancement of DRAM Performance by Adopting Metal-Interlayer-Semiconductor Source/Drain Contact Structure on DRAM Cell

Muyeong Son, Seung Geun Jung, Seung Hwan Kim, Euyjin Park, Sul Hwan Lee, Hyun Yong Yu

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds