Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

Jae Hoon Jung; Byeong Kwon Ju; Yun Hi Lee; Jin Jang; Myung Hwan Oh

doi:10.1109/55.568760

Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

Jae Hoon Jung, Byeong Kwon Ju, Yun Hi Lee, Jin Jang, Myung Hwan Oh

Department of Physics

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

Original language	English
Pages (from-to)	197-199
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	18
Issue number	5
DOIs	https://doi.org/10.1109/55.568760
Publication status	Published - 1997 May

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/55.568760

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title = "Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating",

abstract = "The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.",

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AU - Jung, Jae Hoon

AU - Ju, Byeong Kwon

AU - Lee, Yun Hi

AU - Jang, Jin

AU - Oh, Myung Hwan

PY - 1997/5

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N2 - The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

AB - The effect of Diamond Like Carbon (DLC) films, coated by a layer-by-layer technique using PECVD (plasma enhanced chemical vapor deposition) on the electron emission characteristics of Molybdenum (Mo)-tip field emitter array (FEA) is examined. The turn-on voltage was lowered from 80 V for the Mo-tip to 65 V for the DLC-coated Mo-tip FEA while the maximum emission current was increased from 140 μA for the Mo-tip to 320 μA for the DLC-coated Mo-tip FEA composed of 900 emitters. For an anode current of 0.1 (μA/emitter) the gate voltage for the DLC-coated Mo-tip FEA and Mo-tip FEA was about 87 and 107 V, respectively. It was also confirmed that the emission current of a DLC-coated Mo-tip FEA was more stable than that of a Mo-tip FEA.

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Enhancement of electron emission efficiency and stability of molybdenum-tip field emitter array by diamond like carbon coating

Abstract

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