Enhancement of photo- and electro-luminescence of GaN-based LED structure grown on a nanometer-scaled patterned sapphire substrate

Hyoungwon Park, Kyeong Jae Byeon, Jong Jin Jang, Okhyun Nam, Heon Lee

    Research output: Contribution to journalArticlepeer-review

    26 Citations (Scopus)

    Abstract

    In this study, a 2 in. sized a highly periodic nanometer-scaled patterned sapphire substrate (NPSS) was fabricated using nanoimprint lithography (NIL) and inductively coupled plasma etching to improve the light-extraction efficiency of GaN-based light-emitting diodes (LEDs). A blue LED structure was grown on the nanometer-scale patterned sapphire substrates, and the photoluminescence (PL) and electroluminescence (EL) were measured to confirm the effectiveness of the nanometer-scaled patterns on sapphire. An improvement in luminescence efficiency was observed when NPSS was applied; 2 times stronger PL intensity and 2.8 times stronger EL intensity than the LED structure grown on the unpatterned sapphire wafers were measured. These results show highly periodic nanometer-scaled patterns create multi-photon scattering and effectively enhance the light-extraction efficiency of LEDs.

    Original languageEnglish
    Pages (from-to)3207-3213
    Number of pages7
    JournalMicroelectronic Engineering
    Volume88
    Issue number11
    DOIs
    Publication statusPublished - 2011 Nov

    Bibliographical note

    Funding Information:
    This study is the outcome of a Manpower Development Program for Energy & Resources supported by the Ministry of Knowledge and Economy (MKE). This work was supported partially by the IT R&D program of MKE/IITA [2009-F-025-01, Development of Core Technology for High Efficiency Light Emitting Diode based on New Concepts].

    Copyright:
    Copyright 2011 Elsevier B.V., All rights reserved.

    Keywords

    • Electroluminescence (EL)
    • GaN-based light-emitting diodes (LEDs)
    • Nanoimprint lithography (NIL)
    • Nanometer-scaled patterned sapphire substrate (NPSS)
    • Photoluminescence (PL)

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Atomic and Molecular Physics, and Optics
    • Condensed Matter Physics
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering

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