TY - JOUR
T1 - Erosion damage and optical transmittance of diamond films
AU - Lim, Dae Soon
AU - Kim, Jong Hoon
N1 - Funding Information:
This work was supported in part by the Korea Science and Engineering Foundation (KOSEF) through the Ceramic Processing Research Center (CPRC) at Hanyang University.
Copyright:
Copyright 2018 Elsevier B.V., All rights reserved.
PY - 2000/12/1
Y1 - 2000/12/1
N2 - Diamond films on silicon wafers were fabricated by microwave chemical vapor deposition to investigate the effect of erosion damage on optical transmittance. After deposition, the growth side was mechanically polished and the silicon substrate was removed by chemical etching with hydrofluoric acid to make an optically flat infra-red (IR) window. With prolonged erosive impacts by SiC particles, the two sides of free-standing diamond windows showed significantly different damage resistance. The optical transmittance of the substrate side, which has smaller diamond grains, was maintained to be the same as that of the non-eroded diamond even after 400 times of repeated erosive impacts. However, optical transmittance of the nucleation side, which has larger diamond grain, was too low to be used as an IR window. The difference in the damage resistance between the substrate side and growth side is discussed based on scanning electron microscopy of the eroded region to explain the different optical behavior of transmittance.
AB - Diamond films on silicon wafers were fabricated by microwave chemical vapor deposition to investigate the effect of erosion damage on optical transmittance. After deposition, the growth side was mechanically polished and the silicon substrate was removed by chemical etching with hydrofluoric acid to make an optically flat infra-red (IR) window. With prolonged erosive impacts by SiC particles, the two sides of free-standing diamond windows showed significantly different damage resistance. The optical transmittance of the substrate side, which has smaller diamond grains, was maintained to be the same as that of the non-eroded diamond even after 400 times of repeated erosive impacts. However, optical transmittance of the nucleation side, which has larger diamond grain, was too low to be used as an IR window. The difference in the damage resistance between the substrate side and growth side is discussed based on scanning electron microscopy of the eroded region to explain the different optical behavior of transmittance.
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U2 - 10.1016/S0040-6090(00)01299-2
DO - 10.1016/S0040-6090(00)01299-2
M3 - Article
AN - SCOPUS:0034508157
SN - 0040-6090
VL - 377-378
SP - 217
EP - 221
JO - Thin Solid Films
JF - Thin Solid Films
ER -