@article{3ce96d6cbd184a01997264c9f2864249,
title = "Erratum: Effect of imprinting pressure on residual layer thickness in UV nano-imprint lithography (Journal of Vacuum Science and Technology B (2005) 23 (1102))",
author = "Heon Lee",
year = "2005",
doi = "10.1116/1.2013316",
language = "English",
volume = "23",
pages = "2176",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "5",
}