Essential Macleod Program (EMP) simulated fabrication of high quality Zn: SnO2/Ag/Zn:SnO2 multilayer transparent conducting electrode on flexible substrates

Yoonho Cho, Narendra S. Parmar, Sahn Nahm, Ji Won Choi

    Research output: Contribution to journalArticlepeer-review

    15 Citations (Scopus)

    Abstract

    In the quest of promising Indium free amorphous transparent conducting oxide (TCO), Zn-doped SnO2/Ag/Zn-doped SnO2 (OMO) multilayer films were prepared on flexible polyethylene terephthalate (PET) substrates by RF sputtering at room temperature (RT). Growth parameters were optimized by varying sputtering power and working pressure, to have high electrical conductivity and optical transmittance. Optimization of the thickness of each layer was done by Essential Macleod Program (EMP) simulation to get the higher transmission through OMO multilayer. The sheet resistance and transmittance of 3 at% Zn-doped SnO2 thin film (30 nm) were 2.23 kΩ/□, (ρ ~ 8.92×10−3 Ω∙cm) and 81.3% (at λ ~ 550 nm), respectively. By using optimized thicknesses of Zn-doped SnO2 (30 nm) and Ag (12 nm) and optimized growth condition Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer thin films were deposited. The low sheet resistance of 7.2 Ω/□ and high optical transmittance of 85.1% in the 550 nm wavelength region was achieved with 72 nm multilayer film.

    Original languageEnglish
    Pages (from-to)7216-7221
    Number of pages6
    JournalCeramics International
    Volume43
    Issue number9
    DOIs
    Publication statusPublished - 2017 Jun 15

    Keywords

    • OMO multilayer
    • Optical and electrical properties
    • SnO
    • TCO
    • Zn-doping

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Ceramics and Composites
    • Process Chemistry and Technology
    • Surfaces, Coatings and Films
    • Materials Chemistry

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