FingerprintDive into the research topics of 'Etching characteristics of Ba(Mg1/3Ta2/3)O3 film by using Cl2/SF6 electron cyclotron resonance plasma'. Together they form a unique fingerprint.
- Sort by
Kwang Ho Kwon, Seung Youl Kang, Sang Kyun Lee, Sung Ihl Kim, Nam Kwan Hong, Sahn Nahm, Young Sik Kim
Research output: Contribution to journal › Article › peer-review