Abstract
Due to the reduced thickness of thin films formed via atomic layer deposition, analyzing their true mechanical properties is difficult. To overcome this drawback, tensile tests on free-standing alumina thin films floating on water were conducted to measure their mechanical properties. Tensile tests on alumina thin films formed at different deposition temperatures were also conducted; the results indicated that higher Young's modulus and the strength were obtained from thin films formed at higher deposition temperatures. Factors responsible for the variations in mechanical properties were investigated through analyses of the structure, density, and composition of the films.
Original language | English |
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Pages (from-to) | 256-261 |
Number of pages | 6 |
Journal | Scripta Materialia |
Volume | 187 |
DOIs | |
Publication status | Published - 2020 Oct |
Bibliographical note
Publisher Copyright:© 2020
Keywords
- Alumina
- Atomic layer deposition
- Mechanical properties
- Tensile test
- Thin film
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys