Evaluating mechanical properties of 100nm-thick atomic layer deposited Al2O3 as a free-standing film

Junmo Koo, Sangmin Lee, Junmo Kim, Dong Hwan Kim, Byoung Ho Choi, Taek Soo Kim, Joon Hyung Shim

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Keyphrases

Engineering

Chemical Engineering