@inproceedings{763ef683f7f84de795995ee7c08c447a,
title = "Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors",
abstract = "We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH3 gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH3 gases. Also, recovery time of CNT gas sensor is measured according to temperature.",
keywords = "Carbon nanotubes, Electric resistance, Electric variables measurement, Electrical resistance measurement, Gas detectors, Mechanical systems, Micromechanical devices, Organic materials, Temperature measurement, Temperature sensors",
author = "Moon, {S. I.} and Lee, {D. J.} and Jang, {Y. T.} and Soo-Won Kim and Yun-Hi Lee and Ju, {B. K.}",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1215269",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "127--130",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}