Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors

S. I. Moon, D. J. Lee, Y. T. Jang, S. W. Kim, Y. H. Lee, B. K. Ju

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH3 gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH3 gases. Also, recovery time of CNT gas sensor is measured according to temperature.

    Original languageEnglish
    Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages127-130
    Number of pages4
    ISBN (Electronic)0780377311, 9780780377318
    DOIs
    Publication statusPublished - 2003
    Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
    Duration: 2003 Jun 82003 Jun 12

    Publication series

    NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
    Volume1

    Other

    Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
    Country/TerritoryUnited States
    CityBoston
    Period03/6/803/6/12

    Bibliographical note

    Publisher Copyright:
    © 2003 IEEE.

    Keywords

    • Carbon nanotubes
    • Electric resistance
    • Electric variables measurement
    • Electrical resistance measurement
    • Gas detectors
    • Mechanical systems
    • Micromechanical devices
    • Organic materials
    • Temperature measurement
    • Temperature sensors

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

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