Abstract
We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH3 gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH3 gases. Also, recovery time of CNT gas sensor is measured according to temperature.
Original language | English |
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Title of host publication | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 127-130 |
Number of pages | 4 |
ISBN (Electronic) | 0780377311, 9780780377318 |
DOIs | |
Publication status | Published - 2003 |
Event | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12 |
Publication series
Name | TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers |
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Volume | 1 |
Other
Other | 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers |
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Country/Territory | United States |
City | Boston |
Period | 03/6/8 → 03/6/12 |
Bibliographical note
Publisher Copyright:© 2003 IEEE.
Keywords
- Carbon nanotubes
- Electric resistance
- Electric variables measurement
- Electrical resistance measurement
- Gas detectors
- Mechanical systems
- Micromechanical devices
- Organic materials
- Temperature measurement
- Temperature sensors
ASJC Scopus subject areas
- Electrical and Electronic Engineering