Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors

S. I. Moon; D. J. Lee; Y. T. Jang; S. W. Kim; Y. H. Lee; B. K. Ju

doi:10.1109/SENSOR.2003.1215269

Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors

S. I. Moon, D. J. Lee, Y. T. Jang, S. W. Kim, Y. H. Lee, B. K. Ju

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH₃ gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH₃ gases. Also, recovery time of CNT gas sensor is measured according to temperature.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	127-130
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215269
Publication status	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 2003 Jun 8 → 2003 Jun 12

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	1

Other

Other	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	03/6/8 → 03/6/12

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Carbon nanotubes
Electric resistance
Electric variables measurement
Electrical resistance measurement
Gas detectors
Mechanical systems
Micromechanical devices
Organic materials
Temperature measurement
Temperature sensors

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2003.1215269

Cite this

Moon, S. I., Lee, D. J., Jang, Y. T., Kim, S. W., Lee, Y. H., & Ju, B. K. (2003). Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 127-130). Article 1215269 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215269

Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors. / Moon, S. I.; Lee, D. J.; Jang, Y. T. et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 127-130 1215269 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Moon, SI, Lee, DJ, Jang, YT, Kim, SW, Lee, YH & Ju, BK 2003, Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1215269, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 1, Institute of Electrical and Electronics Engineers Inc., pp. 127-130, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 03/6/8. https://doi.org/10.1109/SENSOR.2003.1215269

Moon SI, Lee DJ, Jang YT, Kim SW, Lee YH, Ju BK. Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 127-130. 1215269. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1215269

Moon, S. I. ; Lee, D. J. ; Jang, Y. T. et al. / Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 127-130 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

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abstract = "We fabricated the gas sensor using carbon nanotubes (CNTs) and investigated the detection properties for NH3 gas. The sensing material of gas sensor is employed multi-wall carbon nanotubes (MWNTs). The CNT gas sensor structure is realized with technologies of micro-electro mechanical systems (MEMS). The nanotubes gas sensor is operated at room temperature. And the electrical resistance of the carbon nanotubes is measured upon exposure to NH3 gases. Also, recovery time of CNT gas sensor is measured according to temperature.",

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author = "Moon, {S. I.} and Lee, {D. J.} and Jang, {Y. T.} and Kim, {S. W.} and Lee, {Y. H.} and Ju, {B. K.}",

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Evaluation of carbon nanotubes as gas sensing materials in micro gas sensors

Abstract

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Keywords

ASJC Scopus subject areas

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