Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing

Dae Ryook Yang; Kwang Soon Lee; Hyo Jin Ahn; Jay H. Lee

doi:10.1109/TSM.2002.807740

Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing

Dae Ryook Yang, Kwang Soon Lee, Hyo Jin Ahn, Jay H. Lee

Research output: Contribution to journal › Article › peer-review

71 Citations (Scopus)

Abstract

A quadratic-optimal iterative learning control (ILC) method has been designed and implemented on an experimental rapid thermal processing system used for fabricating 8-in silicon wafers. The controller was designed to control the wafer temperatures at three separate locations by manipulating the power inputs to three groups of tungsten-halogen lamps. The controller design was done based on a time-varying linear state-space model, which was identified using experimental input-output data obtained at two different temperatures. When initialized with the input profiles produced by multiloop PI controllers, the ILC controller was seen to be capable of improving the control performance significantly with repeating runs. In a series of experiments with wafers on which thermocouples are glued, the ILC controller, over the course of ten runs, gradually steered the wafer temperatures very close to the respective reference trajectories despite significant disturbances and model errors.

Original language	English
Pages (from-to)	36-44
Number of pages	9
Journal	IEEE Transactions on Semiconductor Manufacturing
Volume	16
Issue number	1
DOIs	https://doi.org/10.1109/TSM.2002.807740
Publication status	Published - 2003 Feb

Bibliographical note

Funding Information:
Manuscript received January 9, 2002; revised June 18, 2002. This work was supported in part by the Korean Ministry of Education through the Brain Korea 21 Project and by S. Joo, Kornic System Co. The work of J. H. Lee was supported by the National Science Foundation CTS under Grant 0096326. D. R. Yang and H. J. Ahn are with the Department of Chemical and Biological Engineering, Korea University, Seoul 136–701, Korea (e-mail: [email protected]; [email protected]) K. S. Lee is with the Department of Chemical Engineering, Sogang University, Seoul 121–742, Korea (e-mail: [email protected]). J. H. Lee is with the School of Chemical Engineering, Georgia Institute of Technology, Atlanta, GA 30332–0100 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TSM.2002.807740

Keywords

Iterative learning control
LQG
Rapid thermal processing
Subspace identification
Time-varying linear state-space model

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/TSM.2002.807740

Cite this

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abstract = "A quadratic-optimal iterative learning control (ILC) method has been designed and implemented on an experimental rapid thermal processing system used for fabricating 8-in silicon wafers. The controller was designed to control the wafer temperatures at three separate locations by manipulating the power inputs to three groups of tungsten-halogen lamps. The controller design was done based on a time-varying linear state-space model, which was identified using experimental input-output data obtained at two different temperatures. When initialized with the input profiles produced by multiloop PI controllers, the ILC controller was seen to be capable of improving the control performance significantly with repeating runs. In a series of experiments with wafers on which thermocouples are glued, the ILC controller, over the course of ten runs, gradually steered the wafer temperatures very close to the respective reference trajectories despite significant disturbances and model errors.",

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note = "Funding Information: Manuscript received January 9, 2002; revised June 18, 2002. This work was supported in part by the Korean Ministry of Education through the Brain Korea 21 Project and by S. Joo, Kornic System Co. The work of J. H. Lee was supported by the National Science Foundation CTS under Grant 0096326. D. R. Yang and H. J. Ahn are with the Department of Chemical and Biological Engineering, Korea University, Seoul 136–701, Korea (e-mail: [email protected]; [email protected]) K. S. Lee is with the Department of Chemical Engineering, Sogang University, Seoul 121–742, Korea (e-mail: [email protected]). J. H. Lee is with the School of Chemical Engineering, Georgia Institute of Technology, Atlanta, GA 30332–0100 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TSM.2002.807740",

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Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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