Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing

  • Dae Ryook Yang*
  • , Kwang Soon Lee
  • , Hyo Jin Ahn
  • , Jay H. Lee
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › peer-review

    73 Citations (Scopus)

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    Engineering