Keyphrases
All-dielectric Metasurface
100%
Amorphous Silicon
33%
Bandwidth Enhancement
33%
Biological Products
33%
Chemical Molecule
33%
Dielectric Metamaterials
66%
Electromagnetic Field
33%
Electron Beam Lithography
33%
Full Width at Half Maximum
33%
Glass Wafer
33%
Hydrogen Fluoride
33%
In-situ Reaction
33%
Index Changes
33%
Isotropic Response
33%
Label-free Detection
33%
Low Loss
33%
Magnetic Resonance
100%
Mass Concentration
33%
Metamaterials
100%
Nanohole Array
33%
Nanophotonic Applications
33%
Near-infrared
33%
Near-zero Index
33%
Negative Permeability
33%
Negative Refractive Index
33%
Reaction Monitoring
33%
Reactive Ion Etching
33%
Refractive Index Change
33%
Resonance Shift
66%
Silicon Membrane
33%
Silicon Nanohole (SiNH)
100%
Square Lattice
33%
Subwavelength
33%
Surrounding Medium
33%
Ultrathin
33%
Ultrathin Silicon
100%
Wet Etching
33%
Material Science
Amorphous Silicon
12%
Dielectric Material
100%
Lithography
12%
Metamaterial
100%
Reactive Ion Etching
12%
Refractive Index
25%
Silicon
100%
Wet Etching
12%