Abstract
This paper presents a resonant microsensor for detecting simultaneously both the Earth's magnetic field and its acceleration. The structure design is based on the Lorentz force and lateral driving. The process uses a silicon-on-glass wafer and gold-silicon eutectic bonding for the wafer-level hermetic packaging. A prototype sensor with resonant frequencies in a range of around 2 kHz shows Q factors of about 7. In total, 2 mW is consumed in the current driving element. When 1 g and 0.35 G were applied to the sensor, a sensitivity of 104 mVg and 5 mVG was measured.
Original language | English |
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Pages (from-to) | 108-112 |
Number of pages | 5 |
Journal | Electrochemical and Solid-State Letters |
Volume | 10 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2007 |
ASJC Scopus subject areas
- General Chemical Engineering
- General Materials Science
- Physical and Theoretical Chemistry
- Electrochemistry
- Electrical and Electronic Engineering