Fabrication and characterization of a microsensor for detecting simultaneously both Earth's magnetic field and acceleration

Ji Man Cho, Kyoung Soo Kim, Sengdo An, Sang Yong Lee, Soo Won Kim

    Research output: Contribution to journalArticlepeer-review

    1 Citation (Scopus)

    Abstract

    This paper presents a resonant microsensor for detecting simultaneously both the Earth's magnetic field and its acceleration. The structure design is based on the Lorentz force and lateral driving. The process uses a silicon-on-glass wafer and gold-silicon eutectic bonding for the wafer-level hermetic packaging. A prototype sensor with resonant frequencies in a range of around 2 kHz shows Q factors of about 7. In total, 2 mW is consumed in the current driving element. When 1 g and 0.35 G were applied to the sensor, a sensitivity of 104 mVg and 5 mVG was measured.

    Original languageEnglish
    Pages (from-to)108-112
    Number of pages5
    JournalElectrochemical and Solid-State Letters
    Volume10
    Issue number9
    DOIs
    Publication statusPublished - 2007

    ASJC Scopus subject areas

    • General Chemical Engineering
    • General Materials Science
    • Physical and Theoretical Chemistry
    • Electrochemistry
    • Electrical and Electronic Engineering

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