Fabrication and characterization of carbon nanotube tip modified by focused ion beam

Chang Soo Han; Young Hyun Shin; Yu Hwan Yoon

doi:10.1109/NEMS.2007.352029

Fabrication and characterization of carbon nanotube tip modified by focused ion beam

Chang Soo Han, Young Hyun Shin, Yu Hwan Yoon

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We described on the development of a scanning probe microscope tip with CNT (carbon nanotube). Dielectrophoresis was used for assembling the CNT on the sharp end of a Si AFM tip. To adjust the morphology of the CNT tip, focused ion beam (FIB) was systematically used. The straightness of the CNT tip was improved and its length was controlled by cutting a part of the CNT. Tip's characteristics in non-contact AFM(Atomic Force Microscopy) mode was mainly dealt with various experimental results such as wear, deep trench measurement, and high resolution imaging. Comparing to the conventional Si tip, a CNT-modified FIB tip was stronger to wear, more traceable to deep trench structure and more adaptable to figure out the fine structure like anodic aluminum oxide (AAO) structure. We expect that CNT-modified tip is very promising for industrial usage of AFM.

Original language	English
Title of host publication	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Pages	290-293
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2007.352029
Publication status	Published - 2007
Externally published	Yes
Event	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand Duration: 2007 Jan 16 → 2007 Jan 19

Publication series

Name	Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Other

Other	2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007
Country/Territory	Thailand
City	Bangkok
Period	07/1/16 → 07/1/19

Keywords

AFM tip
Carbon nanotubes
Focuesd ion beam

ASJC Scopus subject areas

Computer Networks and Communications
Computer Science Applications
Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2007.352029

Cite this

Han, C. S., Shin, Y. H., & Yoon, Y. H. (2007). Fabrication and characterization of carbon nanotube tip modified by focused ion beam. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 (pp. 290-293). Article 4160587 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). https://doi.org/10.1109/NEMS.2007.352029

Fabrication and characterization of carbon nanotube tip modified by focused ion beam. / Han, Chang Soo; Shin, Young Hyun; Yoon, Yu Hwan.
Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 290-293 4160587 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Han, CS, Shin, YH & Yoon, YH 2007, Fabrication and characterization of carbon nanotube tip modified by focused ion beam. in Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007., 4160587, Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, pp. 290-293, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007, Bangkok, Thailand, 07/1/16. https://doi.org/10.1109/NEMS.2007.352029

Han CS, Shin YH, Yoon YH. Fabrication and characterization of carbon nanotube tip modified by focused ion beam. In Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. p. 290-293. 4160587. (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007). doi: 10.1109/NEMS.2007.352029

Han, Chang Soo ; Shin, Young Hyun ; Yoon, Yu Hwan. / Fabrication and characterization of carbon nanotube tip modified by focused ion beam. Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007. 2007. pp. 290-293 (Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007).

@inproceedings{79924e005e6045d19ea5132db04c20c0,

title = "Fabrication and characterization of carbon nanotube tip modified by focused ion beam",

abstract = "We described on the development of a scanning probe microscope tip with CNT (carbon nanotube). Dielectrophoresis was used for assembling the CNT on the sharp end of a Si AFM tip. To adjust the morphology of the CNT tip, focused ion beam (FIB) was systematically used. The straightness of the CNT tip was improved and its length was controlled by cutting a part of the CNT. Tip's characteristics in non-contact AFM(Atomic Force Microscopy) mode was mainly dealt with various experimental results such as wear, deep trench measurement, and high resolution imaging. Comparing to the conventional Si tip, a CNT-modified FIB tip was stronger to wear, more traceable to deep trench structure and more adaptable to figure out the fine structure like anodic aluminum oxide (AAO) structure. We expect that CNT-modified tip is very promising for industrial usage of AFM.",

keywords = "AFM tip, Carbon nanotubes, Focuesd ion beam",

author = "Han, {Chang Soo} and Shin, {Young Hyun} and Yoon, {Yu Hwan}",

year = "2007",

doi = "10.1109/NEMS.2007.352029",

language = "English",

isbn = "1424406102",

series = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",

pages = "290--293",

booktitle = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",

note = "2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",

}

TY - GEN

T1 - Fabrication and characterization of carbon nanotube tip modified by focused ion beam

AU - Han, Chang Soo

AU - Shin, Young Hyun

AU - Yoon, Yu Hwan

PY - 2007

Y1 - 2007

N2 - We described on the development of a scanning probe microscope tip with CNT (carbon nanotube). Dielectrophoresis was used for assembling the CNT on the sharp end of a Si AFM tip. To adjust the morphology of the CNT tip, focused ion beam (FIB) was systematically used. The straightness of the CNT tip was improved and its length was controlled by cutting a part of the CNT. Tip's characteristics in non-contact AFM(Atomic Force Microscopy) mode was mainly dealt with various experimental results such as wear, deep trench measurement, and high resolution imaging. Comparing to the conventional Si tip, a CNT-modified FIB tip was stronger to wear, more traceable to deep trench structure and more adaptable to figure out the fine structure like anodic aluminum oxide (AAO) structure. We expect that CNT-modified tip is very promising for industrial usage of AFM.

AB - We described on the development of a scanning probe microscope tip with CNT (carbon nanotube). Dielectrophoresis was used for assembling the CNT on the sharp end of a Si AFM tip. To adjust the morphology of the CNT tip, focused ion beam (FIB) was systematically used. The straightness of the CNT tip was improved and its length was controlled by cutting a part of the CNT. Tip's characteristics in non-contact AFM(Atomic Force Microscopy) mode was mainly dealt with various experimental results such as wear, deep trench measurement, and high resolution imaging. Comparing to the conventional Si tip, a CNT-modified FIB tip was stronger to wear, more traceable to deep trench structure and more adaptable to figure out the fine structure like anodic aluminum oxide (AAO) structure. We expect that CNT-modified tip is very promising for industrial usage of AFM.

KW - AFM tip

KW - Carbon nanotubes

KW - Focuesd ion beam

UR - http://www.scopus.com/inward/record.url?scp=34548126906&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548126906&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2007.352029

DO - 10.1109/NEMS.2007.352029

M3 - Conference contribution

AN - SCOPUS:34548126906

SN - 1424406102

SN - 9781424406104

T3 - Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

SP - 290

EP - 293

BT - Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

T2 - 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Y2 - 16 January 2007 through 19 January 2007

ER -

Fabrication and characterization of carbon nanotube tip modified by focused ion beam

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