Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

Jee Soo Chang; Myung Ki Kim; Yong Hee Lee; Jung H. Shin; Gun Yong Sung

doi:10.1117/12.764327

Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

Jee Soo Chang, Myung Ki Kim, Yong Hee Lee, Jung H. Shin, Gun Yong Sung

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.

Original language	English
Title of host publication	Optoelectronic Integrated Circuits X
DOIs	https://doi.org/10.1117/12.764327
Publication status	Published - 2008
Externally published	Yes
Event	Optoelectronic Integrated Circuits X - San Jose, CA, United States Duration: 2008 Jan 21 → 2008 Jan 23

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6897
ISSN (Print)	0277-786X

Conference

Conference	Optoelectronic Integrated Circuits X
Country/Territory	United States
City	San Jose, CA
Period	08/1/21 → 08/1/23

Keywords

Er
Micro-disk
Silicon-rich silicon nitride

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.764327

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Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks. / Chang, Jee Soo; Kim, Myung Ki; Lee, Yong Hee et al.
Optoelectronic Integrated Circuits X. 2008. 68970O (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6897).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Chang, JS, Kim, MK, Lee, YH, Shin, JH & Sung, GY 2008, Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks. in Optoelectronic Integrated Circuits X., 68970O, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6897, Optoelectronic Integrated Circuits X, San Jose, CA, United States, 08/1/21. https://doi.org/10.1117/12.764327

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title = "Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks",

abstract = "Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.",

keywords = "Er, Micro-disk, Silicon-rich silicon nitride",

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language = "English",

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AU - Chang, Jee Soo

AU - Kim, Myung Ki

AU - Lee, Yong Hee

AU - Shin, Jung H.

AU - Sung, Gun Yong

PY - 2008

Y1 - 2008

N2 - Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.

AB - Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.

KW - Er

KW - Micro-disk

KW - Silicon-rich silicon nitride

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T3 - Proceedings of SPIE - The International Society for Optical Engineering

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Y2 - 21 January 2008 through 23 January 2008

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Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

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Keywords

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