Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

Jee Soo Chang, Myung Ki Kim, Yong Hee Lee, Jung H. Shin, Gun Yong Sung

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)


Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.

Original languageEnglish
Title of host publicationOptoelectronic Integrated Circuits X
Publication statusPublished - 2008
Externally publishedYes
EventOptoelectronic Integrated Circuits X - San Jose, CA, United States
Duration: 2008 Jan 212008 Jan 23

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferenceOptoelectronic Integrated Circuits X
Country/TerritoryUnited States
CitySan Jose, CA


  • Er
  • Micro-disk
  • Silicon-rich silicon nitride

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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