Fabrication and characterization of piezoelectric driven microdiaphragm resonating sensor for a biosensing application

Myung Sic Chae, Sang Myung Lee, Yong Kyoung Yoo, Soo Hyun Lee, Jinsik Kim, Tae Song Kim, Dong June Ahn, Jeong Hoon Lee, Kyo Seon Hwang

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


The detection capability of microresonating sensors is decided by the resonant properties (mass sensitivity and quality factor) because the microresonating sensors have detection principle that the target material of small amount quantitatively detect by measuring the resonant properties change of microresonators. Mass sensitivity is important factor to evaluate minimum detectable mass of microresonating sensors. For the biomolecule detection in liquid, microresonaotrs have to keep the quality factor that can discriminate small frequency change when the liquid sample injected on the microresonating sensors. In order to study mass sensitivity and quality factor of the fabricated microdiaphragm sensors, Pt thin film with different thicknesses are deposited on the our Pb(Zr0.52Ti0.48)O3 layer-embedded microdiaphragm sensors. Increasing the mass sensitivity ranging from 1.68 to 36.61 Hz/ng which is found with the decreasing the width of squared microdiaphragms ranging 900 to 300 μm. The mass sensitivity of our microdiaphragm sensor stands comparison with microcantilever sensor of length scale of 200∈~∈300 μm. Moreover, we find that the quality factor is kept on more than 23 that was ten times better than microcantilever resonating sensor with length scale of 200 μm.

Original languageEnglish
Pages (from-to)383-389
Number of pages7
JournalJournal of Electroceramics
Issue number4
Publication statusPublished - 2014 Jun

Bibliographical note

Funding Information:
Fig. 5 Quality factor comparison of microdiaphragm sensor. (a) PDMS liquid cell including the microdiaphragm sensor and liquid chamber with a volume of about 6.65 μL. (b) Resonance response of microdiaphragm sensor when the PDMS chamber was filled with air and liquid Acknowledgments The authors are very grateful for the financial support from the KIST institutional program (2E24590).


  • Diaphragm sensor
  • mass sensitivity
  • membrane resonator
  • quality factor
  • resonant frequency

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanics of Materials
  • Ceramics and Composites
  • Materials Chemistry
  • Electrical and Electronic Engineering


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