Fabrication and characterization of piezoelectric driven microdiaphragm resonating sensor for a biosensing application

Myung Sic Chae; Sang Myung Lee; Yong Kyoung Yoo; Soo Hyun Lee; Jinsik Kim; Tae Song Kim; Dong June Ahn; Jeong Hoon Lee; Kyo Seon Hwang

doi:10.1007/s10832-014-9928-y

Fabrication and characterization of piezoelectric driven microdiaphragm resonating sensor for a biosensing application

Myung Sic Chae, Sang Myung Lee, Yong Kyoung Yoo, Soo Hyun Lee, Jinsik Kim, Tae Song Kim, Dong June Ahn, Jeong Hoon Lee, Kyo Seon Hwang

Department of Chemical and Biological Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The detection capability of microresonating sensors is decided by the resonant properties (mass sensitivity and quality factor) because the microresonating sensors have detection principle that the target material of small amount quantitatively detect by measuring the resonant properties change of microresonators. Mass sensitivity is important factor to evaluate minimum detectable mass of microresonating sensors. For the biomolecule detection in liquid, microresonaotrs have to keep the quality factor that can discriminate small frequency change when the liquid sample injected on the microresonating sensors. In order to study mass sensitivity and quality factor of the fabricated microdiaphragm sensors, Pt thin film with different thicknesses are deposited on the our Pb(Zr_0.52Ti_0.48)O₃ layer-embedded microdiaphragm sensors. Increasing the mass sensitivity ranging from 1.68 to 36.61 Hz/ng which is found with the decreasing the width of squared microdiaphragms ranging 900 to 300 μm. The mass sensitivity of our microdiaphragm sensor stands comparison with microcantilever sensor of length scale of 200∈~∈300 μm. Moreover, we find that the quality factor is kept on more than 23 that was ten times better than microcantilever resonating sensor with length scale of 200 μm.

Original language	English
Pages (from-to)	383-389
Number of pages	7
Journal	Journal of Electroceramics
Volume	32
Issue number	4
DOIs	https://doi.org/10.1007/s10832-014-9928-y
Publication status	Published - 2014 Jun

Bibliographical note

Funding Information:
Fig. 5 Quality factor comparison of microdiaphragm sensor. (a) PDMS liquid cell including the microdiaphragm sensor and liquid chamber with a volume of about 6.65 μL. (b) Resonance response of microdiaphragm sensor when the PDMS chamber was filled with air and liquid Acknowledgments The authors are very grateful for the financial support from the KIST institutional program (2E24590).

Keywords

Diaphragm sensor
mass sensitivity
membrane resonator
quality factor
resonant frequency

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanics of Materials
Ceramics and Composites
Materials Chemistry
Electrical and Electronic Engineering

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10.1007/s10832-014-9928-y

Cite this

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title = "Fabrication and characterization of piezoelectric driven microdiaphragm resonating sensor for a biosensing application",

abstract = "The detection capability of microresonating sensors is decided by the resonant properties (mass sensitivity and quality factor) because the microresonating sensors have detection principle that the target material of small amount quantitatively detect by measuring the resonant properties change of microresonators. Mass sensitivity is important factor to evaluate minimum detectable mass of microresonating sensors. For the biomolecule detection in liquid, microresonaotrs have to keep the quality factor that can discriminate small frequency change when the liquid sample injected on the microresonating sensors. In order to study mass sensitivity and quality factor of the fabricated microdiaphragm sensors, Pt thin film with different thicknesses are deposited on the our Pb(Zr0.52Ti0.48)O3 layer-embedded microdiaphragm sensors. Increasing the mass sensitivity ranging from 1.68 to 36.61 Hz/ng which is found with the decreasing the width of squared microdiaphragms ranging 900 to 300 μm. The mass sensitivity of our microdiaphragm sensor stands comparison with microcantilever sensor of length scale of 200∈~∈300 μm. Moreover, we find that the quality factor is kept on more than 23 that was ten times better than microcantilever resonating sensor with length scale of 200 μm.",

keywords = "Diaphragm sensor, mass sensitivity, membrane resonator, quality factor, resonant frequency",

author = "Chae, {Myung Sic} and Lee, {Sang Myung} and Yoo, {Yong Kyoung} and Lee, {Soo Hyun} and Jinsik Kim and Kim, {Tae Song} and Ahn, {Dong June} and Lee, {Jeong Hoon} and Hwang, {Kyo Seon}",

note = "Funding Information: Fig. 5 Quality factor comparison of microdiaphragm sensor. (a) PDMS liquid cell including the microdiaphragm sensor and liquid chamber with a volume of about 6.65 μL. (b) Resonance response of microdiaphragm sensor when the PDMS chamber was filled with air and liquid Acknowledgments The authors are very grateful for the financial support from the KIST institutional program (2E24590).",

year = "2014",

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doi = "10.1007/s10832-014-9928-y",

language = "English",

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AU - Chae, Myung Sic

AU - Lee, Sang Myung

AU - Yoo, Yong Kyoung

AU - Lee, Soo Hyun

AU - Kim, Jinsik

AU - Kim, Tae Song

AU - Ahn, Dong June

AU - Lee, Jeong Hoon

AU - Hwang, Kyo Seon

N1 - Funding Information: Fig. 5 Quality factor comparison of microdiaphragm sensor. (a) PDMS liquid cell including the microdiaphragm sensor and liquid chamber with a volume of about 6.65 μL. (b) Resonance response of microdiaphragm sensor when the PDMS chamber was filled with air and liquid Acknowledgments The authors are very grateful for the financial support from the KIST institutional program (2E24590).

PY - 2014/6

Y1 - 2014/6

N2 - The detection capability of microresonating sensors is decided by the resonant properties (mass sensitivity and quality factor) because the microresonating sensors have detection principle that the target material of small amount quantitatively detect by measuring the resonant properties change of microresonators. Mass sensitivity is important factor to evaluate minimum detectable mass of microresonating sensors. For the biomolecule detection in liquid, microresonaotrs have to keep the quality factor that can discriminate small frequency change when the liquid sample injected on the microresonating sensors. In order to study mass sensitivity and quality factor of the fabricated microdiaphragm sensors, Pt thin film with different thicknesses are deposited on the our Pb(Zr0.52Ti0.48)O3 layer-embedded microdiaphragm sensors. Increasing the mass sensitivity ranging from 1.68 to 36.61 Hz/ng which is found with the decreasing the width of squared microdiaphragms ranging 900 to 300 μm. The mass sensitivity of our microdiaphragm sensor stands comparison with microcantilever sensor of length scale of 200∈~∈300 μm. Moreover, we find that the quality factor is kept on more than 23 that was ten times better than microcantilever resonating sensor with length scale of 200 μm.

AB - The detection capability of microresonating sensors is decided by the resonant properties (mass sensitivity and quality factor) because the microresonating sensors have detection principle that the target material of small amount quantitatively detect by measuring the resonant properties change of microresonators. Mass sensitivity is important factor to evaluate minimum detectable mass of microresonating sensors. For the biomolecule detection in liquid, microresonaotrs have to keep the quality factor that can discriminate small frequency change when the liquid sample injected on the microresonating sensors. In order to study mass sensitivity and quality factor of the fabricated microdiaphragm sensors, Pt thin film with different thicknesses are deposited on the our Pb(Zr0.52Ti0.48)O3 layer-embedded microdiaphragm sensors. Increasing the mass sensitivity ranging from 1.68 to 36.61 Hz/ng which is found with the decreasing the width of squared microdiaphragms ranging 900 to 300 μm. The mass sensitivity of our microdiaphragm sensor stands comparison with microcantilever sensor of length scale of 200∈~∈300 μm. Moreover, we find that the quality factor is kept on more than 23 that was ten times better than microcantilever resonating sensor with length scale of 200 μm.

KW - Diaphragm sensor

KW - mass sensitivity

KW - membrane resonator

KW - quality factor

KW - resonant frequency

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JF - Journal of Electroceramics

IS - 4

ER -

Fabrication and characterization of piezoelectric driven microdiaphragm resonating sensor for a biosensing application

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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