Abstract
Suspended single-walled carbon nanotubes (SWCNTs) between SiO2 pillars via a direct lithographic route using a simple mixture of catalyst precursor [Co(III) acetylacetonate, Co(acac)3] and conventional electron beam resist (ma-N2403) were fabricated. The catalytic electron beam resist (Cat-ER) layer plays dual roles as a catalyst and a resist layer for the growth and alignment of CNTs, respectively. The structure of the grown nanotube was characterized by Raman spectroscopy (633 nm laser excitation). Nanotubes grown from Cat-ER with Co(acac)3 show the typical Raman spectra of SWCNTs which are characterized by the strong tangential bands near to 1590 cm-1 and radial breathing modes (RBMs) in the low frequency region (<300 cm-1). The calculated diameter of the probed nanotubes individually corresponds to the range 0.86-1.77 nm.
Original language | English |
---|---|
Pages (from-to) | 186-190 |
Number of pages | 5 |
Journal | Solid State Communications |
Volume | 139 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2006 Jul |
Bibliographical note
Funding Information:This work was supported by the Korean Ministry of Science and Technology through the Tera-level Nano Devices (TND) Program.
Keywords
- A. Carbon nanotube
- B. Suspended nanotube
- C. Raman spectroscopy
- D. Electron beam lithography
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Materials Chemistry