Fabrication and characterization of suspended single-walled carbon nanotubes

Byung Seok Oh, Yo Sep Min, Eun Ju Bae, Wanjun Park, Young Keun Kim

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Suspended single-walled carbon nanotubes (SWCNTs) between SiO2 pillars via a direct lithographic route using a simple mixture of catalyst precursor [Co(III) acetylacetonate, Co(acac)3] and conventional electron beam resist (ma-N2403) were fabricated. The catalytic electron beam resist (Cat-ER) layer plays dual roles as a catalyst and a resist layer for the growth and alignment of CNTs, respectively. The structure of the grown nanotube was characterized by Raman spectroscopy (633 nm laser excitation). Nanotubes grown from Cat-ER with Co(acac)3 show the typical Raman spectra of SWCNTs which are characterized by the strong tangential bands near to 1590 cm-1 and radial breathing modes (RBMs) in the low frequency region (<300 cm-1). The calculated diameter of the probed nanotubes individually corresponds to the range 0.86-1.77 nm.

Original languageEnglish
Pages (from-to)186-190
Number of pages5
JournalSolid State Communications
Issue number4
Publication statusPublished - 2006 Jul

Bibliographical note

Funding Information:
This work was supported by the Korean Ministry of Science and Technology through the Tera-level Nano Devices (TND) Program.


  • A. Carbon nanotube
  • B. Suspended nanotube
  • C. Raman spectroscopy
  • D. Electron beam lithography

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • Materials Chemistry


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