Fabrication and characterization of suspended single-walled carbon nanotubes

Byung Seok Oh; Yo Sep Min; Eun Ju Bae; Wanjun Park; Young Keun Kim

doi:10.1016/j.ssc.2006.05.028

Fabrication and characterization of suspended single-walled carbon nanotubes

Byung Seok Oh, Yo Sep Min, Eun Ju Bae, Wanjun Park, Young Keun Kim

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Suspended single-walled carbon nanotubes (SWCNTs) between SiO₂ pillars via a direct lithographic route using a simple mixture of catalyst precursor [Co(III) acetylacetonate, Co(acac)₃] and conventional electron beam resist (ma-N2403) were fabricated. The catalytic electron beam resist (Cat-ER) layer plays dual roles as a catalyst and a resist layer for the growth and alignment of CNTs, respectively. The structure of the grown nanotube was characterized by Raman spectroscopy (633 nm laser excitation). Nanotubes grown from Cat-ER with Co(acac)₃ show the typical Raman spectra of SWCNTs which are characterized by the strong tangential bands near to 1590 cm^-1 and radial breathing modes (RBMs) in the low frequency region (<300 cm^-1). The calculated diameter of the probed nanotubes individually corresponds to the range 0.86-1.77 nm.

Original language	English
Pages (from-to)	186-190
Number of pages	5
Journal	Solid State Communications
Volume	139
Issue number	4
DOIs	https://doi.org/10.1016/j.ssc.2006.05.028
Publication status	Published - 2006 Jul

Bibliographical note

Funding Information:
This work was supported by the Korean Ministry of Science and Technology through the Tera-level Nano Devices (TND) Program.

Keywords

A. Carbon nanotube
B. Suspended nanotube
C. Raman spectroscopy
D. Electron beam lithography

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Materials Chemistry

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10.1016/j.ssc.2006.05.028

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title = "Fabrication and characterization of suspended single-walled carbon nanotubes",

abstract = "Suspended single-walled carbon nanotubes (SWCNTs) between SiO2 pillars via a direct lithographic route using a simple mixture of catalyst precursor [Co(III) acetylacetonate, Co(acac)3] and conventional electron beam resist (ma-N2403) were fabricated. The catalytic electron beam resist (Cat-ER) layer plays dual roles as a catalyst and a resist layer for the growth and alignment of CNTs, respectively. The structure of the grown nanotube was characterized by Raman spectroscopy (633 nm laser excitation). Nanotubes grown from Cat-ER with Co(acac)3 show the typical Raman spectra of SWCNTs which are characterized by the strong tangential bands near to 1590 cm-1 and radial breathing modes (RBMs) in the low frequency region (<300 cm-1). The calculated diameter of the probed nanotubes individually corresponds to the range 0.86-1.77 nm.",

keywords = "A. Carbon nanotube, B. Suspended nanotube, C. Raman spectroscopy, D. Electron beam lithography",

author = "Oh, {Byung Seok} and Min, {Yo Sep} and Bae, {Eun Ju} and Wanjun Park and Kim, {Young Keun}",

note = "Funding Information: This work was supported by the Korean Ministry of Science and Technology through the Tera-level Nano Devices (TND) Program. ",

year = "2006",

month = jul,

doi = "10.1016/j.ssc.2006.05.028",

language = "English",

volume = "139",

pages = "186--190",

journal = "Solid State Communications",

issn = "0038-1098",

publisher = "Elsevier Limited",

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TY - JOUR

T1 - Fabrication and characterization of suspended single-walled carbon nanotubes

AU - Oh, Byung Seok

AU - Min, Yo Sep

AU - Bae, Eun Ju

AU - Park, Wanjun

AU - Kim, Young Keun

N1 - Funding Information: This work was supported by the Korean Ministry of Science and Technology through the Tera-level Nano Devices (TND) Program.

PY - 2006/7

Y1 - 2006/7

N2 - Suspended single-walled carbon nanotubes (SWCNTs) between SiO2 pillars via a direct lithographic route using a simple mixture of catalyst precursor [Co(III) acetylacetonate, Co(acac)3] and conventional electron beam resist (ma-N2403) were fabricated. The catalytic electron beam resist (Cat-ER) layer plays dual roles as a catalyst and a resist layer for the growth and alignment of CNTs, respectively. The structure of the grown nanotube was characterized by Raman spectroscopy (633 nm laser excitation). Nanotubes grown from Cat-ER with Co(acac)3 show the typical Raman spectra of SWCNTs which are characterized by the strong tangential bands near to 1590 cm-1 and radial breathing modes (RBMs) in the low frequency region (<300 cm-1). The calculated diameter of the probed nanotubes individually corresponds to the range 0.86-1.77 nm.

AB - Suspended single-walled carbon nanotubes (SWCNTs) between SiO2 pillars via a direct lithographic route using a simple mixture of catalyst precursor [Co(III) acetylacetonate, Co(acac)3] and conventional electron beam resist (ma-N2403) were fabricated. The catalytic electron beam resist (Cat-ER) layer plays dual roles as a catalyst and a resist layer for the growth and alignment of CNTs, respectively. The structure of the grown nanotube was characterized by Raman spectroscopy (633 nm laser excitation). Nanotubes grown from Cat-ER with Co(acac)3 show the typical Raman spectra of SWCNTs which are characterized by the strong tangential bands near to 1590 cm-1 and radial breathing modes (RBMs) in the low frequency region (<300 cm-1). The calculated diameter of the probed nanotubes individually corresponds to the range 0.86-1.77 nm.

KW - A. Carbon nanotube

KW - B. Suspended nanotube

KW - C. Raman spectroscopy

KW - D. Electron beam lithography

UR - http://www.scopus.com/inward/record.url?scp=33745958388&partnerID=8YFLogxK

U2 - 10.1016/j.ssc.2006.05.028

DO - 10.1016/j.ssc.2006.05.028

M3 - Article

AN - SCOPUS:33745958388

SN - 0038-1098

VL - 139

SP - 186

EP - 190

JO - Solid State Communications

JF - Solid State Communications

IS - 4

ER -

Fabrication and characterization of suspended single-walled carbon nanotubes

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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