Abstract
By using a substrate transferring technique, poly-diamond thick films having a smooth or rough surface could be fabricated as field emitter materials. The diamond film with a smooth surface, which was transferred from the interface between the (100) Si substrate and poly-diamond deposited by plasma-enhanced CVD, showed better field emission properties in terms of emission current density with improved vacuum level dependence as compared with original poly-diamond film from a rough surface.
| Original language | English |
|---|---|
| Pages (from-to) | 855-859 |
| Number of pages | 5 |
| Journal | Microelectronics Journal |
| Volume | 29 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 1998 Nov |
Keywords
- Diamond
- Field emission
- Film
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering