Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Chulmin Choi; Kunbae Noh; Young Oh; Cihan Kuru; Daehoon Hong; Li Han Chen; Sy Hwang Liou; Tae Yeon Seong; Sungho Jin

doi:10.1109/TMAG.2011.2158197

Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Chulmin Choi, Kunbae Noh, Young Oh, Cihan Kuru, Daehoon Hong, Li Han Chen, Sy Hwang Liou, Tae Yeon Seong, Sungho Jin

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]_n multilayer film with a [Co 0.3 nm Pd 0.8 nm]₈/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]_n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]_n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

Original language	English
Article number	6027682
Pages (from-to)	2532-2535
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	47
Issue number	10
DOIs	https://doi.org/10.1109/TMAG.2011.2158197
Publication status	Published - 2011 Oct

Bibliographical note

Funding Information:
This work was supported by National Science Foundation Nanomanufacturing Division under Grant CMMI #0856674, Center for Magnetic Recording Research at UC San Diego, National Research Foundation grant through World Class University Program (R33-2008-000-10025-0), and Center for Nanostructured Materials Technology Grant Frontier R&D Program.

Keywords

Ion implantation
nanolithography
perpendicular magnetic recording

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/TMAG.2011.2158197

Cite this

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abstract = "We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.",

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author = "Chulmin Choi and Kunbae Noh and Young Oh and Cihan Kuru and Daehoon Hong and Chen, {Li Han} and Liou, {Sy Hwang} and Seong, {Tae Yeon} and Sungho Jin",

note = "Funding Information: This work was supported by National Science Foundation Nanomanufacturing Division under Grant CMMI #0856674, Center for Magnetic Recording Research at UC San Diego, National Research Foundation grant through World Class University Program (R33-2008-000-10025-0), and Center for Nanostructured Materials Technology Grant Frontier R&D Program.",

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AU - Chen, Li Han

AU - Liou, Sy Hwang

AU - Seong, Tae Yeon

AU - Jin, Sungho

N1 - Funding Information: This work was supported by National Science Foundation Nanomanufacturing Division under Grant CMMI #0856674, Center for Magnetic Recording Research at UC San Diego, National Research Foundation grant through World Class University Program (R33-2008-000-10025-0), and Center for Nanostructured Materials Technology Grant Frontier R&D Program.

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AB - We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

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Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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