Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Chulmin Choi; Kunbae Noh; Young Oh; Cihan Kuru; Daehoon Hong; Li Han Chen; Sy Hwang Liou; Tae Yeon Seong; Sungho Jin

doi:10.1109/TMAG.2011.2158197

Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Chulmin Choi, Kunbae Noh, Young Oh, Cihan Kuru, Daehoon Hong, Li Han Chen, Sy Hwang Liou, Tae Yeon Seong, Sungho Jin

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]_n multilayer film with a [Co 0.3 nm Pd 0.8 nm]₈/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]_n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]_n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

Original language	English
Article number	6027682
Pages (from-to)	2532-2535
Number of pages	4
Journal	IEEE Transactions on Magnetics
Volume	47
Issue number	10
DOIs	https://doi.org/10.1109/TMAG.2011.2158197
Publication status	Published - 2011 Oct

Keywords

Ion implantation
nanolithography
perpendicular magnetic recording

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/TMAG.2011.2158197

Cite this

@article{db86cd7e27e4495ebcd69ef4dfefe334,

title = "Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media",

abstract = "We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.",

keywords = "Ion implantation, nanolithography, perpendicular magnetic recording",

author = "Chulmin Choi and Kunbae Noh and Young Oh and Cihan Kuru and Daehoon Hong and Chen, {Li Han} and Liou, {Sy Hwang} and Seong, {Tae Yeon} and Sungho Jin",

note = "Funding Information: This work was supported by National Science Foundation Nanomanufacturing Division under Grant CMMI #0856674, Center for Magnetic Recording Research at UC San Diego, National Research Foundation grant through World Class University Program (R33-2008-000-10025-0), and Center for Nanostructured Materials Technology Grant Frontier R&D Program.",

year = "2011",

month = oct,

doi = "10.1109/TMAG.2011.2158197",

language = "English",

volume = "47",

pages = "2532--2535",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "10",

}

TY - JOUR

T1 - Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

AU - Choi, Chulmin

AU - Noh, Kunbae

AU - Oh, Young

AU - Kuru, Cihan

AU - Hong, Daehoon

AU - Chen, Li Han

AU - Liou, Sy Hwang

AU - Seong, Tae Yeon

AU - Jin, Sungho

N1 - Funding Information: This work was supported by National Science Foundation Nanomanufacturing Division under Grant CMMI #0856674, Center for Magnetic Recording Research at UC San Diego, National Research Foundation grant through World Class University Program (R33-2008-000-10025-0), and Center for Nanostructured Materials Technology Grant Frontier R&D Program.

PY - 2011/10

Y1 - 2011/10

N2 - We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

AB - We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO2 perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd]n multilayer film with a [Co 0.3 nm Pd 0.8 nm]8/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd]n multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd]n multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

KW - Ion implantation

KW - nanolithography

KW - perpendicular magnetic recording

UR - http://www.scopus.com/inward/record.url?scp=80053473789&partnerID=8YFLogxK

U2 - 10.1109/TMAG.2011.2158197

DO - 10.1109/TMAG.2011.2158197

M3 - Article

AN - SCOPUS:80053473789

SN - 0018-9464

VL - 47

SP - 2532

EP - 2535

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 10

M1 - 6027682

ER -

Fabrication and magnetic properties of nonmagnetic ion implanted magnetic recording films for bit-patterned media

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this