Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Seung Min Oh; Min Gyu Kang; Young Ho Do; Chong Yun Kang; Seok Jin Yoon; Sahn Nahm

doi:10.4313/TEEM.2011.12.5.222

Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Seung Min Oh, Min Gyu Kang, Young Ho Do, Chong Yun Kang, Seok Jin Yoon, Sahn Nahm

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO₂/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a P_r of 40.5 μC/cm² and an E_c of 156 kV/cm.

Original language	English
Pages (from-to)	222-225
Number of pages	4
Journal	Transactions on Electrical and Electronic Materials
Volume	12
Issue number	5
DOIs	https://doi.org/10.4313/TEEM.2011.12.5.222
Publication status	Published - 2011 Oct

Keywords

Lead zirconate titanate
Poly(vinylpyrrolidone)
Sol-gel
Thickness control

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.4313/TEEM.2011.12.5.222

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@article{f028e6825a6e475e85286a3fb5ef17c0,

title = "Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method",

abstract = "Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm.",

keywords = "Lead zirconate titanate, Poly(vinylpyrrolidone), Sol-gel, Thickness control",

author = "Oh, {Seung Min} and Kang, {Min Gyu} and Do, {Young Ho} and Kang, {Chong Yun} and Yoon, {Seok Jin} and Sahn Nahm",

year = "2011",

month = oct,

doi = "10.4313/TEEM.2011.12.5.222",

language = "English",

volume = "12",

pages = "222--225",

journal = "Transactions on Electrical and Electronic Materials",

issn = "1229-7607",

publisher = "The Korean Institute of Electrical and Electronic Material Engineers",

number = "5",

}

TY - JOUR

T1 - Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

AU - Oh, Seung Min

AU - Kang, Min Gyu

AU - Do, Young Ho

AU - Kang, Chong Yun

AU - Yoon, Seok Jin

AU - Nahm, Sahn

PY - 2011/10

Y1 - 2011/10

N2 - Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm.

AB - Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 μm were deposited by repetitive coating with successive third-step heat treatments at 150°C, 350°C and 650°C;. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a Pr of 40.5 μC/cm2 and an Ec of 156 kV/cm.

KW - Lead zirconate titanate

KW - Poly(vinylpyrrolidone)

KW - Sol-gel

KW - Thickness control

UR - http://www.scopus.com/inward/record.url?scp=84930482590&partnerID=8YFLogxK

U2 - 10.4313/TEEM.2011.12.5.222

DO - 10.4313/TEEM.2011.12.5.222

M3 - Article

AN - SCOPUS:84930482590

SN - 1229-7607

VL - 12

SP - 222

EP - 225

JO - Transactions on Electrical and Electronic Materials

JF - Transactions on Electrical and Electronic Materials

IS - 5

ER -

Fabrication of 1 μm thickness lead zirconium titanate films using poly(N-vinylpyrrolidone) added sol-gel method

Abstract

Keywords

ASJC Scopus subject areas

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