@inproceedings{14148a907589477aaa0b07c9bef1ea79,
title = "Fabrication of 100nm sized patterns on a non-planar substrate by using nanoimprinting lithography",
abstract = "A faithful pattern transferring onto a non-planar substrate was demonstrated by nano-imprinting technique. Uniform pressing of a flexible template onto a substrate was important for the faithful pattern transferring. Both the UV-based and thermal imprinting techniques were used to transfer patterns of 200nm sized features to the non-planar substrates such as outer wall of rod and inner surface of cylinder and it could be used for nano-devices such as lab on a chip.",
keywords = "Flexible template, Nano -pattern duplication, Nano-imprint lithography, Polymer template, Thermally curable monomer resin, UV curable monomer resin",
author = "H. Lee and Huh, {J. Y.} and Yang, {K. Y.} and S. Hong and Jung, {G. Y.}",
year = "2007",
doi = "10.4028/3-908451-30-2.665",
language = "English",
isbn = "3908451302",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
number = "PART 1",
pages = "665--668",
booktitle = "Nanoscience and Technology",
edition = "PART 1",
note = "China International Conference on Nanoscience and Technology, ChinaNANO 2005 ; Conference date: 09-06-2005 Through 11-06-2005",
}