Fabrication of 2D photonic crystal assisted Y2O 3:Eu3+ thin-film phosphors by direct nano-imprinting

Ki Young Ko; Eun Jin Her; William T. Nichols; Heon Lee; Young Rag Do; Jinho Ahn

doi:10.1016/j.mee.2011.03.162

Fabrication of 2D photonic crystal assisted Y₂O ₃:Eu³⁺ thin-film phosphors by direct nano-imprinting

Ki Young Ko, Eun Jin Her, William T. Nichols, Heon Lee, Young Rag Do, Jinho Ahn

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

The effect of a two-dimensional Y₂O₃:Eu³⁺ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y₂O₃:Eu³⁺ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y₂O ₃:Eu³⁺ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y₂O ₃:Eu³⁺ sol into a Y₂O₃:Eu ³⁺ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y₂O ₃:Eu³⁺ thin-film phosphor layer. The extraction efficiency of the 2D Y₂O₃:Eu³⁺ gel PC-assisted Y ₂O₃:Eu³⁺ thin-film phosphor was approximately 3.7 times higher than a non-PC Y₂O₃:Eu³⁺ gel coated Y₂O₃:Eu³⁺ thin-film phosphor.

Original language	English
Pages (from-to)	2930-2933
Number of pages	4
Journal	Microelectronic Engineering
Volume	88
Issue number	9
DOIs	https://doi.org/10.1016/j.mee.2011.03.162
Publication status	Published - 2011 Sept

Bibliographical note

Funding Information:
This work was supported by NBIT Fusion Technology R&D program of MKE (Korea) and a Platform Project grant ( 10033636-2010-11 ) supported by the Ministry of Knowledge Economy of Korea . This work was also supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology ( 2010-0015035 ).

Keywords

Nano-imprint
PDMS stamp
Photonic crystal
Sol-gel
Thin-film phosphor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.1016/j.mee.2011.03.162

Cite this

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title = "Fabrication of 2D photonic crystal assisted Y2O 3:Eu3+ thin-film phosphors by direct nano-imprinting",

abstract = "The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O 3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O 3:Eu3+ sol into a Y2O3:Eu 3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O 3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y 2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.",

keywords = "Nano-imprint, PDMS stamp, Photonic crystal, Sol-gel, Thin-film phosphor",

author = "Ko, {Ki Young} and Her, {Eun Jin} and Nichols, {William T.} and Heon Lee and Do, {Young Rag} and Jinho Ahn",

note = "Funding Information: This work was supported by NBIT Fusion Technology R&D program of MKE (Korea) and a Platform Project grant ( 10033636-2010-11 ) supported by the Ministry of Knowledge Economy of Korea . This work was also supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology ( 2010-0015035 ).",

year = "2011",

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doi = "10.1016/j.mee.2011.03.162",

language = "English",

volume = "88",

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AU - Ko, Ki Young

AU - Her, Eun Jin

AU - Nichols, William T.

AU - Lee, Heon

AU - Do, Young Rag

AU - Ahn, Jinho

N1 - Funding Information: This work was supported by NBIT Fusion Technology R&D program of MKE (Korea) and a Platform Project grant ( 10033636-2010-11 ) supported by the Ministry of Knowledge Economy of Korea . This work was also supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology ( 2010-0015035 ).

PY - 2011/9

Y1 - 2011/9

N2 - The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O 3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O 3:Eu3+ sol into a Y2O3:Eu 3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O 3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y 2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.

AB - The effect of a two-dimensional Y2O3:Eu3+ photonic crystal (PC) pattern on the extraction efficiency of photoluminescence from the underlying Y2O3:Eu3+ thin-film phosphor was investigated. The photonic crystal structure was fabricated using a direct nano-imprint process with a Pechini-type Y2O 3:Eu3+ sol as the nano-imprint resin and a patterned polydimethylsiloxane (PDMS) stamp as the mold. The elevated pressure and temperature of the nano-imprinting process converts the Y2O 3:Eu3+ sol into a Y2O3:Eu 3+ gel resulting in high definition transfer of the 2D patterns of the master template into the gel on top of the Y2O 3:Eu3+ thin-film phosphor layer. The extraction efficiency of the 2D Y2O3:Eu3+ gel PC-assisted Y 2O3:Eu3+ thin-film phosphor was approximately 3.7 times higher than a non-PC Y2O3:Eu3+ gel coated Y2O3:Eu3+ thin-film phosphor.

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