Fabrication of imprint stamp is a key issue of nanoimprint lithography. In this study, we attempt to fabricate the nickel imprint stamp using hot embossing lithography and electroforming processes. As small as 50 nm sized patterns of original silicon master were faithfully transferred to polyvinyl chloride (PVC) film. By electroforming on hot embossed PVC film, nickel stamp, which has the same patterns of original silicon master stamp, was successfully fabricated.
Bibliographical noteFunding Information:
This research was supported by a Grant (M102KN01001) from the center for Nano-scale Mechatronics and Manufacturing, one of the 21st century Frontier Research Programs supported by the Ministry of Science and Technology of Korea.
- Hot embossing
- Nanoimprint lithography
- Nickel stamp
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering