Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography

Jong Hwa Lee; Ki yeon Yang; Sung Hoon Hong; Heon Lee; Kyung Woo Choi

doi:10.1016/j.mee.2007.12.058

Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography

Jong Hwa Lee, Ki yeon Yang, Sung Hoon Hong, Heon Lee, Kyung Woo Choi

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

As a promising substrate for various kinds of devices, polyethylene-terephthalate (PET) film has many advantages in terms of transparency, flexibility, chemical stability, thermal resistance, mechanical strength and low fabrication cost. In order to build actual device structure on PET substrate, micro to nanometer scale patterns of functional material have to be formed. In this work, 70 nm sized resist patterns with near zero residual layer were made on PET film, using nanoimprint lithography process, based on 'partial filling effect'. After brief oxygen plasma treatment and e-beam evaporation of functional materials such as Cr metal, resist patterns were lifted-off with acetone solution and 70 nm sized Cr nanowire structure was uniformly formed on flexible PET substrate.

Original language	English
Pages (from-to)	710-713
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Issue number	4
DOIs	https://doi.org/10.1016/j.mee.2007.12.058
Publication status	Published - 2008 Apr

Bibliographical note

Funding Information:
This research was supported by a Grant (M102KN01001) from the center for Nanoscale Mechatronics and Manufacturing, one of the 21st century Frontier Research Programs supported by the Ministry of Science and Technology of Korea and the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2005-003-D00142).

Keywords

Lift-off
Metal nanowire
Nanoimprint
PET film
PMMA
Partial filling effect

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.1016/j.mee.2007.12.058

Cite this

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title = "Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography",

abstract = "As a promising substrate for various kinds of devices, polyethylene-terephthalate (PET) film has many advantages in terms of transparency, flexibility, chemical stability, thermal resistance, mechanical strength and low fabrication cost. In order to build actual device structure on PET substrate, micro to nanometer scale patterns of functional material have to be formed. In this work, 70 nm sized resist patterns with near zero residual layer were made on PET film, using nanoimprint lithography process, based on 'partial filling effect'. After brief oxygen plasma treatment and e-beam evaporation of functional materials such as Cr metal, resist patterns were lifted-off with acetone solution and 70 nm sized Cr nanowire structure was uniformly formed on flexible PET substrate.",

keywords = "Lift-off, Metal nanowire, Nanoimprint, PET film, PMMA, Partial filling effect",

author = "Lee, {Jong Hwa} and Yang, {Ki yeon} and Hong, {Sung Hoon} and Heon Lee and Choi, {Kyung Woo}",

note = "Funding Information: This research was supported by a Grant (M102KN01001) from the center for Nanoscale Mechatronics and Manufacturing, one of the 21st century Frontier Research Programs supported by the Ministry of Science and Technology of Korea and the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2005-003-D00142). ",

year = "2008",

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doi = "10.1016/j.mee.2007.12.058",

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AU - Lee, Jong Hwa

AU - Yang, Ki yeon

AU - Hong, Sung Hoon

AU - Lee, Heon

AU - Choi, Kyung Woo

N1 - Funding Information: This research was supported by a Grant (M102KN01001) from the center for Nanoscale Mechatronics and Manufacturing, one of the 21st century Frontier Research Programs supported by the Ministry of Science and Technology of Korea and the Korea Research Foundation Grant funded by the Korean Government (MOEHRD, Basic Research Promotion Fund) (KRF-2005-003-D00142).

PY - 2008/4

Y1 - 2008/4

N2 - As a promising substrate for various kinds of devices, polyethylene-terephthalate (PET) film has many advantages in terms of transparency, flexibility, chemical stability, thermal resistance, mechanical strength and low fabrication cost. In order to build actual device structure on PET substrate, micro to nanometer scale patterns of functional material have to be formed. In this work, 70 nm sized resist patterns with near zero residual layer were made on PET film, using nanoimprint lithography process, based on 'partial filling effect'. After brief oxygen plasma treatment and e-beam evaporation of functional materials such as Cr metal, resist patterns were lifted-off with acetone solution and 70 nm sized Cr nanowire structure was uniformly formed on flexible PET substrate.

AB - As a promising substrate for various kinds of devices, polyethylene-terephthalate (PET) film has many advantages in terms of transparency, flexibility, chemical stability, thermal resistance, mechanical strength and low fabrication cost. In order to build actual device structure on PET substrate, micro to nanometer scale patterns of functional material have to be formed. In this work, 70 nm sized resist patterns with near zero residual layer were made on PET film, using nanoimprint lithography process, based on 'partial filling effect'. After brief oxygen plasma treatment and e-beam evaporation of functional materials such as Cr metal, resist patterns were lifted-off with acetone solution and 70 nm sized Cr nanowire structure was uniformly formed on flexible PET substrate.

KW - Lift-off

KW - Metal nanowire

KW - Nanoimprint

KW - PET film

KW - PMMA

KW - Partial filling effect

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JO - Microelectronic Engineering

JF - Microelectronic Engineering

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Fabrication of 70 nm narrow metal nanowire structure on flexible PET film by nanoimprint lithography

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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