Fabrication of a peristaltic PDMS micropump

Ok Chan Jeong; Sin Wook Park; Sang Sik Yang; James Jungho Pak

doi:10.1016/j.sna.2005.01.035

Fabrication of a peristaltic PDMS micropump

Ok Chan Jeong, Sin Wook Park, Sang Sik Yang, James Jungho Pak

School of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

111 Citations (Scopus)

Abstract

This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.

Original language	English
Pages (from-to)	453-458
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	123-124
DOIs	https://doi.org/10.1016/j.sna.2005.01.035
Publication status	Published - 2005 Sept 23

Keywords

Flow rate
Peristaltic thermopneumatic micropump
Polydimethylsiloxane (PDMS)

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2005.01.035

Cite this

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title = "Fabrication of a peristaltic PDMS micropump",

abstract = "This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.",

keywords = "Flow rate, Peristaltic thermopneumatic micropump, Polydimethylsiloxane (PDMS)",

author = "Jeong, {Ok Chan} and Park, {Sin Wook} and Yang, {Sang Sik} and Pak, {James Jungho}",

note = "Funding Information: This research, under the contract project code MS-03-212-01, has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr ), which carries out one of the 21st century's Frontier R&D Projects sponsored by the Korea Ministry of Science and Technology. ",

year = "2005",

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doi = "10.1016/j.sna.2005.01.035",

language = "English",

volume = "123-124",

pages = "453--458",

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AU - Jeong, Ok Chan

AU - Park, Sin Wook

AU - Yang, Sang Sik

AU - Pak, James Jungho

N1 - Funding Information: This research, under the contract project code MS-03-212-01, has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr ), which carries out one of the 21st century's Frontier R&D Projects sponsored by the Korea Ministry of Science and Technology.

PY - 2005/9/23

Y1 - 2005/9/23

N2 - This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.

AB - This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.

KW - Flow rate

KW - Peristaltic thermopneumatic micropump

KW - Polydimethylsiloxane (PDMS)

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U2 - 10.1016/j.sna.2005.01.035

DO - 10.1016/j.sna.2005.01.035

M3 - Article

AN - SCOPUS:24944473399

SN - 0924-4247

VL - 123-124

SP - 453

EP - 458

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Fabrication of a peristaltic PDMS micropump

Abstract

Keywords

ASJC Scopus subject areas

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