Fabrication of a peristaltic PDMS micropump

Ok Chan Jeong, Sin Wook Park, Sang Sik Yang, James Jungho Pak

Research output: Contribution to journalArticlepeer-review

111 Citations (Scopus)


This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force. The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port. The micropump is fabricated by the spin-coating process, the two-step curing process, the molding process using negative photoresist, etc. The diameter and the thickness of the actuator diaphragm are 2.5 mm and 30 μm, respectively. The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micropump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micropump is about 0.36 μL/s at 2 Hz for the zero hydraulic pressure difference, when the three-phase input voltage is 20 V.

Original languageEnglish
Pages (from-to)453-458
Number of pages6
JournalSensors and Actuators, A: Physical
Publication statusPublished - 2005 Sept 23


  • Flow rate
  • Peristaltic thermopneumatic micropump
  • Polydimethylsiloxane (PDMS)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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